Journal of the Japan Society of Applied Electromagnetics
巻
2
号
3
ページ
48 - 54
発行年
1994-09-10
ISSN
0919-4452
NCID
AN10457520
出版者
日本AEM学会
抄録
Plasma reactors demand unique requirements of their power sources such as high-voltage output, variable frequency and a current limiting capability. This paper shows a new means of providing power to a plasma reactor based on a magnetic frequency tripler and transformer. The integration of the tripler and transformer allows one to obtain improved operating characteristics and power utilization compared to othr conventional types of power sources.
An Integrated Power Supplying System for a Plasma Reactor
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TE-PR-YAMADA-S-076.pdf
(395.9KB)
