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振動環境で利用できる走査型光干渉応用形状計測技術
https://doi.org/10.24517/00049983
https://doi.org/10.24517/0004998391bb2173-f064-48c9-b110-7871b6f9810d
名前 / ファイル | ライセンス | アクション |
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TE-PR-ADACHI-M-195.pdf (1.0 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2018-06-15 | |||||
タイトル | ||||||
タイトル | 振動環境で利用できる走査型光干渉応用形状計測技術 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Vertical-scanning shape-measurement interferometry applicable to vibrating environment | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
ID登録 | ||||||
ID登録 | 10.24517/00049983 | |||||
ID登録タイプ | JaLC | |||||
著者 |
安達, 正明
× 安達, 正明× 平野, 勇輝× 河村, 昌範× 岩尾, 雄太 |
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著者別表示 |
Adachi, Masaaki
× Adachi, Masaaki× Hirano, Yuuki× Kawamura, Masanori× Iwao, Yuuta |
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提供者所属 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 金沢大学理工研究域機械工学系 | |||||
書誌情報 |
精密工学会学術講演会講演論文集 en : 2008 JSPE Autumn Meeting 巻 2008 Autumn, 号 C43, p. 195-196, 発行日 2008 |
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NCID | ||||||
識別子タイプ | NCID | |||||
関連識別子 | BA90159927 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.11522/pscjspe.2008A.0.195.0 | |||||
出版者 | ||||||
出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | 垂直走査型干渉応用形状計測技術は極小部品の高精度3次元形状計測に広く利用されている.しかし振動環境下で利用しようとすると,適正な位相シフト量への制御ができない,段差形状の場合は上面と下面を異なる時間で計測するため振動変位が誤差となる等の問題が発生し,使用できなかった.我々は走査型干渉顕微鏡に内蔵可能なリアルタイム変位計の開発を行ってきた.そして振動下でも計測できる高精度形状計測技術を開発した. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 出版者照会後に全文公開 | |||||
権利 | ||||||
権利情報 | Copyright © The Japan Society for Precision Engineering | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/ | |||||
関連名称 | https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/ | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://www.jspe.or.jp/ | |||||
関連名称 | http://www.jspe.or.jp/ |