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干渉顕微鏡観察下の粗面の垂直変位測定(第2報)
https://doi.org/10.24517/00049988
https://doi.org/10.24517/000499885de5d476-fb6a-4a12-8a33-c4e1939dedeb
名前 / ファイル | ライセンス | アクション |
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TE-PR-ADACHI-M-495.pdf (1.1 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2018-06-15 | |||||
タイトル | ||||||
タイトル | 干渉顕微鏡観察下の粗面の垂直変位測定(第2報) | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Vertical-displacement measurement of a rough surface observed by an interference microscope (Second report) | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
ID登録 | ||||||
ID登録 | 10.24517/00049988 | |||||
ID登録タイプ | JaLC | |||||
著者 |
安達, 正明
× 安達, 正明× 河村, 昌範× 岩尾, 雄太 |
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著者別表示 |
Adachi, Masaaki
× Adachi, Masaaki× Kawamura, Masanori× Iwao, Yuuta |
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提供者所属 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 金沢大学理工研究域機械工学系 | |||||
書誌情報 |
精密工学会学術講演会講演論文集 en : 2009 JSPE Autumn Meeting 巻 2009 Autumn, 号 G34, p. 495-496, 発行日 2009 |
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NCID | ||||||
識別子タイプ | NCID | |||||
関連識別子 | BA90159927 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.11522/pscjspe.2009A.0.495.0 | |||||
出版者 | ||||||
出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | 垂直走査型干渉顕微鏡を用いる形状計測法は外部振動の影響を極めて受けやすい.我々は,外部振動の影響を受けない形状測定法の開発を目指して,測定対象とする粗面が作る干渉像の垂直走査に伴う変化から,干渉計の光路差変化量を高精度に測定する方法を研究して来た.そして,粗面でも光路差変化量が測定可能であることを確認した.今回は,用いる対物レンズの開口の大きさの測定値への影響を実験的に調べたので報告する. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 出版者照会後に全文公開 | |||||
権利 | ||||||
権利情報 | Copyright © The Japan Society for Precision Engineering | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/ | |||||
関連名称 | https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/ | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://www.jspe.or.jp/ | |||||
関連名称 | http://www.jspe.or.jp/ |