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干渉顕微鏡観察下の粗面の垂直変位測定
https://doi.org/10.24517/00049993
https://doi.org/10.24517/0004999372ee4942-01a4-4e63-9957-1535dd45f1b0
名前 / ファイル | ライセンス | アクション |
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TE-PR-ADACHI-M-807.pdf (1.0 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2018-06-15 | |||||
タイトル | ||||||
タイトル | 干渉顕微鏡観察下の粗面の垂直変位測定 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Vertical-displacement measurement of a rough surface observed by an interference microscope | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
ID登録 | ||||||
ID登録 | 10.24517/00049993 | |||||
ID登録タイプ | JaLC | |||||
著者 |
安達, 正明
× 安達, 正明× 河村, 昌範× 岩尾, 雄太 |
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著者別表示 |
Adachi, Masaaki
× Adachi, Masaaki× Kawamura, Masanori× Iwao, Yuuta |
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提供者所属 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 金沢大学理工研究域機械工学系 | |||||
書誌情報 |
精密工学会学術講演会講演論文集 en : 2009 JSPE Spring Meeting 巻 2009 Spring, 号 K37, p. 807-808, 発行日 2009 |
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NCID | ||||||
識別子タイプ | NCID | |||||
関連識別子 | BA90159927 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.11522/pscjspe.2009S.0.807.0 | |||||
出版者 | ||||||
出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | 干渉顕微鏡を用いた垂直走査型3D形状計測では観察面を一定量高精度に垂直移動させながら干渉画像を取得する必要がある.この方法を振動環境下でも使用したいと考える.そこで顕微鏡観察下の粗面の垂直変位量をラインカメラで高精度に計測する手法を研究した.実験では垂直走査しながら2Dカメラを用いて干渉像を連続取込みし,複数線上の光強度を抜き出し,抜き出し位置による変位測定値の違いが最小になる処理方法を追求した. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 出版者照会後に全文公開 | |||||
権利 | ||||||
権利情報 | Copyright © The Japan Society for Precision Engineering | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/ | |||||
関連名称 | https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/ | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://www.jspe.or.jp/ | |||||
関連名称 | http://www.jspe.or.jp/ |