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振動環境下で撮影された干渉像からの高精度位相抽出
http://hdl.handle.net/2297/36462
http://hdl.handle.net/2297/3646247ee959f-bab0-4289-a220-9341f42ec29e
名前 / ファイル | ライセンス | アクション |
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TE-PR-ADACHI-M-502.pdf (5.7 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2017-10-03 | |||||
タイトル | ||||||
タイトル | 振動環境下で撮影された干渉像からの高精度位相抽出 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Phase Extraction from Interferograms captured under Vibrating Environment | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
安達, 正明
× 安達, 正明× 丹羽, 康人× 岩尾, 雄太 |
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書誌情報 |
精密工学会誌 = Journal of the Japan Society for Precision Engineering 巻 77, 号 5, p. 502-506, 発行日 2011-01-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0912-0289 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN1003250X | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.2493/jjspe.77.502 | |||||
出版者 | ||||||
出版者 | 精密工学会 = Japan Society for Precision Engineering | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Vertical-scanning shape-measurement interferometry using white light cannot be used under vertically vibrating environment. Because, it is required to repeat predefined-length vertical movement with nanometer accuracy and interferogram capturing just after the movement. We developed the technology which can measure the changes of optical path difference (OPD) of an interferometer with nanometer resolution at around 20-μs interval. So, the technology can trigger interferogram capturing at even the moment when predefined-length movement happens to complete at an abnormal timing due to external vibrations. But vibrations in exposure time would change interferogram intensity captured. This change results in non-negligible measurement errors. Then we develop new phase extraction method which utilize history of OPD change in the exposure time and can remove the above errors. Validity of this method is also estimated by computer simulations. | |||||
権利 | ||||||
権利情報 | Copyright © 2012 The Japan Society for Precision Engineering 公益社団法人 精密工学会 | 許可を得て登録 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.jstage.jst.go.jp/browse/jjspe/-char/ja/ | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://www.jspe.or.jp/ |