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振動下で撮影された光干渉像を用いた高精度3次元形状計測
http://hdl.handle.net/2297/36461
http://hdl.handle.net/2297/3646131ab46f5-1a2d-421c-a031-ed6675455c9c
名前 / ファイル | ライセンス | アクション |
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TE-PR-ADACHI-M-1076.pdf (7.0 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2017-10-03 | |||||
タイトル | ||||||
タイトル | 振動下で撮影された光干渉像を用いた高精度3次元形状計測 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | High-Precision 3D-Shape Measurement Using Interferograms Exposured Under Vertical Vibration | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
安達, 正明
× 安達, 正明× 佐部田, 龍佳× 丹羽, 康人 |
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書誌情報 |
精密工学会誌 = Journal of the Japan Society for Precision Engineering 巻 78, 号 12, p. 1076-1081, 発行日 2012-01-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0912-0289 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN1003250X | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.2493/jjspe.78.1076 | |||||
出版者 | ||||||
出版者 | 精密工学会 = Japan Society for Precision Engineering | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Vertical-scanning shape-measurement interferometry using white light could not be used under vertically vibrating environment. Because, it is required to repeat predefined-length vertical movement with nanometer accuracy and interferogram capturing just after the movement. We developed the technology which can measure changes of optical path difference (OPD) of an interferometer at around 20-μs interval and can trigger interferogram exposure at even the moment when predefined-length movement complets irregularly due to external vibrations. But vibration during exposure does change interferogram intensities captured. This changes result in phase extraction errors and then shape measurement errors. Then we developed the phase-extraction method which utilizes the history of OPD change during exposure and might remove the above errors. In this paper, validity of this method is estimated by shape-measurement experiments using pulse-like vertical vibrations. | |||||
権利 | ||||||
権利情報 | Copyright © 2012 The Japan Society for Precision Engineering 公益社団法人 精密工学会 | 許可を得て登録 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://www.jspe.or.jp/ | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.jstage.jst.go.jp/browse/jjspe/-char/ja/ |