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{"_buckets": {"deposit": "81753c13-bf99-494f-8796-23fb075e49aa"}, "_deposit": {"created_by": 3, "id": "9105", "owners": [3], "pid": {"revision_id": 0, "type": "depid", "value": "9105"}, "status": "published"}, "_oai": {"id": "oai:kanazawa-u.repo.nii.ac.jp:00009105", "sets": ["936"]}, "author_link": ["12953", "10422", "12954", "12955", "280"], "item_4_biblio_info_8": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2009-01-01", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "3", "bibliographicPageEnd": "445", "bibliographicPageStart": "443", "bibliographicVolumeNumber": "75", "bibliographic_titles": [{"bibliographic_title": "精密工学会誌 = Journal of the Japan Society of Precision Engineering"}]}]}, "item_4_publisher_17": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "精密工学会 = The Japan Society for Precision Engineering"}]}, "item_4_relation_12": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isIdenticalTo", "subitem_relation_type_id": {"subitem_relation_type_id_text": "10.2493/jjspe.75.443", "subitem_relation_type_select": "DOI"}}]}, "item_4_relation_28": {"attribute_name": "関連URI", "attribute_value_mlt": [{"subitem_relation_type_id": {"subitem_relation_type_id_text": "http://www.jspe.or.jp/", "subitem_relation_type_select": "URI"}}, {"subitem_relation_type_id": {"subitem_relation_type_id_text": "https://www.jstage.jst.go.jp/browse/jjspe", "subitem_relation_type_select": "URI"}}, {"subitem_relation_type_id": {"subitem_relation_type_id_text": "http://ci.nii.ac.jp/naid/110007123441/", "subitem_relation_type_select": "URI"}}]}, "item_4_rights_23": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "Copyright © 2007 The Japan Society for Precision Engineering 精密工学会"}]}, "item_4_source_id_11": {"attribute_name": "NCID", "attribute_value_mlt": [{"subitem_source_identifier": "AN1003250X", "subitem_source_identifier_type": "NCID"}]}, "item_4_source_id_9": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0912-0289", "subitem_source_identifier_type": "ISSN"}]}, "item_4_version_type_25": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "上田, 隆司"}], "nameIdentifiers": [{"nameIdentifier": "10422", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "60115996", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://kaken.nii.ac.jp/ja/search/?qm=60115996"}, {"nameIdentifier": "60115996", "nameIdentifierScheme": "研究者番号", "nameIdentifierURI": "https://nrid.nii.ac.jp/nrid/1000060115996"}]}, {"creatorNames": [{"creatorName": "田中, 邦茂"}], "nameIdentifiers": [{"nameIdentifier": "12953", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "西岡, 真吾"}], "nameIdentifiers": [{"nameIdentifier": "12954", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "山田, 啓司"}], "nameIdentifiers": [{"nameIdentifier": "12955", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "細川, 晃"}], "nameIdentifiers": [{"nameIdentifier": "280", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "60432134", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://kaken.nii.ac.jp/ja/search/?qm=60432134"}, {"nameIdentifier": "40199493", "nameIdentifierScheme": "金沢大学研究者情報", "nameIdentifierURI": "http://ridb.kanazawa-u.ac.jp/public/detail.php?kaken=40199493"}, {"nameIdentifier": "40199493", "nameIdentifierScheme": "研究者番号", "nameIdentifierURI": "https://nrid.nii.ac.jp/nrid/1000040199493"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2017-10-03"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "TE-PR-UEDA-T-443.pdf", "filesize": [{"value": "2.5 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 2500000.0, "url": {"label": "TE-PR-UEDA-T-443.pdf", "url": "https://kanazawa-u.repo.nii.ac.jp/record/9105/files/TE-PR-UEDA-T-443.pdf"}, "version_id": "bb296fe0-00b0-48e1-a296-39609fc135ae"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "laser cleaving", "subitem_subject_scheme": "Other"}, {"subitem_subject": "thermal stress", "subitem_subject_scheme": "Other"}, {"subitem_subject": "SiC wafer", "subitem_subject_scheme": "Other"}, {"subitem_subject": "InP wafer", "subitem_subject_scheme": "Other"}, {"subitem_subject": "double layer wafer", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Refrigerating chucking system", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "電子デバイス用ウエハのレーザ割断", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "電子デバイス用ウエハのレーザ割断"}, {"subitem_title": "Laser Cleaving of Wafer for Electric Devices", "subitem_title_language": "en"}]}, "item_type_id": "4", "owner": "3", "path": ["936"], "permalink_uri": "http://hdl.handle.net/2297/38767", "pubdate": {"attribute_name": "公開日", "attribute_value": "2017-10-03"}, "publish_date": "2017-10-03", "publish_status": "0", "recid": "9105", "relation": {}, "relation_version_is_last": true, "title": ["電子デバイス用ウエハのレーザ割断"], "weko_shared_id": -1}
電子デバイス用ウエハのレーザ割断
http://hdl.handle.net/2297/38767
http://hdl.handle.net/2297/3876723d4f0f9-4d0e-4de0-9bd3-a4c115fc018f
名前 / ファイル | ライセンス | アクション |
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TE-PR-UEDA-T-443.pdf (2.5 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2017-10-03 | |||||
タイトル | ||||||
タイトル | 電子デバイス用ウエハのレーザ割断 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Laser Cleaving of Wafer for Electric Devices | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
上田, 隆司
× 上田, 隆司× 田中, 邦茂× 西岡, 真吾× 山田, 啓司× 細川, 晃 |
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書誌情報 |
精密工学会誌 = Journal of the Japan Society of Precision Engineering 巻 75, 号 3, p. 443-445, 発行日 2009-01-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0912-0289 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN1003250X | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.2493/jjspe.75.443 | |||||
出版者 | ||||||
出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
権利 | ||||||
権利情報 | Copyright © 2007 The Japan Society for Precision Engineering 精密工学会 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://www.jspe.or.jp/ | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.jstage.jst.go.jp/browse/jjspe | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://ci.nii.ac.jp/naid/110007123441/ |