精密工学会誌 = Journal of the Japan Society for Precision Engineering
巻
75
号
11
ページ
1299 - 1304
発行年
2009-01-01
ISSN
0912-0289
NCID
AN1003250X
DOI
10.2493/jjspe.75.1299
出版者
精密工学会 = The Japan Society for Precision Engineering
抄録
Vertical-scanning shape-measurement interferometry using white light is widely used to measure 3D shape of objects having step-like shape. This interferometry however cannot be used under vibrating environment. Because, it is required to accurately repeat predefined-step movements over vertical measurement range. We developed new technology which can measure the changes of optical path difference (OPD) of an interference microscope with nanometer resolution. This uses a line camera and a FPGA device and can measure OPD changes with around 20-μs interval. We built this technology onto a vertical-scanning interferometer and estimated performance of the developed technology using some vibration conditions.
振動環境でも利用できる垂直走査型光干渉応用形状計測技術
TE-PR-ADACHI-M-1299.pdf
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