精密工学会誌 = Journal of the Japan Society for Precision Engineering
巻
60
号
9
ページ
1294 - 1298
発行年
1994-01-01
ISSN
0912-0289
NCID
AN1003250X
DOI
10.2493/jjspe.60.1294
出版者
精密工学会 = The Japan Society for Precision Engineering
抄録
Shear mode grinding has recently much attention for the machining of brittle material such as a glass, ceramics and silicon. This study presents the effects of a newly developed ultra high speed grinder, which can achieve speeds five times greater than conventional grinders. Scratching modes on a surface of glass ground with a single point diamond were observed in detail by scanning tunnel microscopy. It was found from the experiments that the grinding mode depends exceedingly upon the circulating speed of the disc. The depth of cut observed with STM was about 20-30% smaller than calculated one. Grinding mode changes due to the shape of stylus tip and the cut of depth is influenced by crossing of the scratches.
ダイヤモンド単粒によるガラスの超高速研削
TE-PR-KUROBE-T-1294.pdf
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