@article{weko_58442_1,
   author	 = "Ali,A.M. and Inokuma,Takao and Al-Hajry,A. and Kobayashi,Hidetsugu and Umezu,I. and Morimoto,Akiharu",
   title	 = "Roles of SiH4 in growth, structural changes and optical properties of nanocrystalline silicon thin films",
   journal	 = "AIP Conference Proceedings",
   year 	 = "2011",
   volume	 = "1370",
   number	 = "",
   pages	 = "68--74"
}