@article{weko_7738_1, author = "Takebe,Masahide and Nakamura,Kazuki and Paul,Narayan Chandra and Iiyama,Koichi and Takamiya,Saburo", title = "GaAs- MISFETs with insulating gate films formed by direct oxidation and by oxinitridation of recessed GaAs surfaces", journal = "IEEE Transactions on Electron Devices", year = "2004", volume = "51", number = "3", pages = "311--316", month = "mar" }