@article{weko_9186_1,
   author	 = "黒部,利次 and 山田,良穂 and 森田,知之 and 山中,喜彦",
   title	 = "ポア自生パッドの開発とそれの研磨加工への応用: 超微細ダイヤモンドによるぜい性材料の研磨",
   journal	 = "精密工学会誌論文集 = Journal of the Japan Society for Precision Engineering. Supplement. Contributed papers",
   year 	 = "2004",
   volume	 = "70",
   number	 = "10",
   pages	 = "1281--1285",
   month	 = "jan"
}