@article{weko_9372_1,
   author	 = "黒部,利次 and 山田,良穂 and 酒井,直人 and 上田,修治 and 新宮,克喜",
   title	 = "微細圧力制御による微小領域の形状修正研磨",
   journal	 = "精密工学会誌 = Journal of the Japan Society for Precision Engineering",
   year 	 = "1994",
   volume	 = "60",
   number	 = "11",
   pages	 = "1642--1646",
   month	 = "jan"
}