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Active damping of the scanner for high-speed atomic force microscopy
https://doi.org/10.24517/00010139
https://doi.org/10.24517/00010139d8982ad1-8e54-44d0-9857-adf2fe291f57
名前 / ファイル | ライセンス | アクション |
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SC-PR-ANDO-T-15.pdf (1.8 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2017-10-03 | |||||
タイトル | ||||||
タイトル | Active damping of the scanner for high-speed atomic force microscopy | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
ID登録 | ||||||
ID登録 | 10.24517/00010139 | |||||
ID登録タイプ | JaLC | |||||
著者 |
Kodera, Noriyuki
× Kodera, Noriyuki× Yamashita, Hayato× Ando, Toshio |
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著者別表示 |
古寺, 哲幸
× 古寺, 哲幸× 安藤, 敏夫 |
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提供者所属 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 金沢大学ナノ生命科学研究所 / 金沢大学理工研究域数物科学系 | |||||
提供者所属 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 金沢大学理学部 | |||||
書誌情報 |
Review of Scientific Instruments 巻 76, 号 5, p. 053708-1-053708-5, 発行日 2005-05-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0034-6748 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1063/1.1903123 | |||||
出版者 | ||||||
出版者 | American Institute of Physics | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | The scanner that moves the sample stage in three dimensions is a crucial device that limits the imaging rate of atomic force microscopy. This limitation derives mainly from the resonant vibrations of the scanner in the z direction (the most frequent scanning direction). Resonance originates in the scanner's mechanical structure as well as in the z piezoactuator itself. We previously demonstrated that the resonance originating in the structure can be minimized by a counterbalancing method. Here we report that the latter resonance from the actuator can be eliminated by an active damping method, with the result the bandwidth of the z scanner nearly reaches the first resonant frequency (150 kHz) of the z piezoactuator. © 2005 American Institute of Physics. | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |