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CO2レーザを用いた液晶表示用ガラスおよびサファイアの熱応力割断
https://doi.org/10.24517/00052916
https://doi.org/10.24517/00052916dbe4005e-a014-4e0f-bd68-bda3edbda3df
名前 / ファイル | ライセンス | アクション |
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TE-PR-UEDA-T-595.pdf (165.2 kB)
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Item type | 学術雑誌論文 / Journal Article_04(1) | |||||
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公開日 | 2019-05-09 | |||||
タイトル | ||||||
タイトル | CO2レーザを用いた液晶表示用ガラスおよびサファイアの熱応力割断 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Thermal Stress Cleaving of Glass and Sapphire Glass by CO2 Laser | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
ID登録 | ||||||
ID登録 | 10.24517/00052916 | |||||
ID登録タイプ | JaLC | |||||
著者 |
藤江, 典久
× 藤江, 典久× 三野, 大樹× 上田, 隆司× 細川, 晃× 山田, 啓司 |
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著者別表示 |
Fujie, Norihisa
× Fujie, Norihisa× Mino, Daiki× Ueda, Takashi× Hosokawa, Akira× Yamada, Keiji |
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提供者所属 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 金沢大学理工研究域機械工学系 | |||||
書誌情報 |
精密工学会学術講演会講演論文集 en : 2006 JSPE Autumn Meeting 巻 2006 Autumn, 号 H22, p. 595-596 |
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NCID | ||||||
識別子タイプ | NCID | |||||
関連識別子 | BA90159927 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.11522/pscjspe.2006A.0.595.0 | |||||
出版者 | ||||||
出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Thermal stress cleaving is a prospective technique for separating a wafer or thin plate from brittle materials such as glasses and ceramics. In this paper, the cleaving mechanism of a glass and a sapphire irradiated with CO2 laser is investigated. A high frequency pulsed laser is used for the purpose of investigating the mechanism of crack propagation more precisely. The AE signal is measured to examine the characteristics of crack propagation. Thermal damage to the surface of the glass causes the deterioration of cleaving accuracy. Consequently, it is important to minimize the thermal damage by controlling the prosess parameters. | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | 熱応力割断はガラスやセラミックといった脆性材料の加工方法として,近年注目されてきている.本研究では,CO2レーザを用いた液晶表示用ガラスおよびサファイアの割断メカニズムについて調査している.き裂の進展メカニズムをより精密に調べる為,高周波数パルス発振のレーザ加工機を用いている.またAE信号測定を行い,き裂進展の状況を観測している.その結果,AE信号によって,き裂の挙動を観察することができることを示している.ガラス表面の熱損傷によって,割断の精度が悪化する為,加工パラメータを制御し,熱損傷を抑えることが重要である. | |||||
内容記述 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 出版者照会後に全文公開 | |||||
権利 | ||||||
権利情報 | 2006 | |||||
権利 | ||||||
権利情報 | Copyright © The Japan Society for Precision Engineering | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/ | |||||
関連名称 | https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/ | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://www.jspe.or.jp/ | |||||
関連名称 | http://www.jspe.or.jp/ |