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High speed and high responsivity avalanche photodiode fabricated by standard CMOS process in blue wavelength region
https://doi.org/10.24517/00059003
https://doi.org/10.24517/00059003a59b76e5-c4a8-49df-87b6-4e2a59072cab
名前 / ファイル | ライセンス | アクション |
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TE-PR-IIYAMA-K-574.pdf (1.3 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2020-08-07 | |||||
タイトル | ||||||
タイトル | High speed and high responsivity avalanche photodiode fabricated by standard CMOS process in blue wavelength region | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
ID登録 | ||||||
ID登録 | 10.24517/00059003 | |||||
ID登録タイプ | JaLC | |||||
著者 |
Iiyama, Koichi
× Iiyama, Koichi× Maruyama, Takeo× Gyobu, Ryoichi× Hishiki, Takuya× Shimotori, Toshiyuki |
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著者別表示 |
飯山, 宏一
× 飯山, 宏一× 丸山, 武男 |
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提供者所属 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 金沢大学理工研究域フロンティア工学系 | |||||
書誌情報 |
IEICE Transactions on Electronics 巻 E101.C, 号 7, p. 574-580, 発行日 2018 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0916-8524 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10826283 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1587/transele.E101.C.574 | |||||
出版者 | ||||||
出版者 | IEICE | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Quadrant silicon avalanche photodiodes (APDs) were fabricated by standard 0.18µm CMOS process, and were characterized at 405nm wavelength for Blu-ray applications. The size of each APD element is 50×50µm2. The dark current was 10pA at low bias voltage, and low crosstalk of about -80dB between adjacent APD elements was achieved. Although the responsivity is less than 0.1A/W at low bias voltage, the responsivity is enhanced to more than 1A/W at less than 10V bias voltage due to avalanche amplification. The wide bandwidth of 1.5GHz was achieved with the responsivity of more than 1A/W, which is limited by the capacitance of the APD. We believe that the fabricated quadrant APD is a promising photodiode for multi-layer Blu-ray system. | |||||
権利 | ||||||
権利情報 | Copyright © IEICE | |||||
権利 | ||||||
権利情報 | Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.jstage.jst.go.jp/browse/transele/-char/en | |||||
関連名称 | https://www.jstage.jst.go.jp/browse/transele/-char/en | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.ieice.org/jpn_r/ | |||||
関連名称 | https://www.ieice.org/jpn_r/ |