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Doping effect of oxygen or nitrogen impurity in hydrogenated amorphous silicon films
https://doi.org/10.24517/00064703
https://doi.org/10.24517/000647035efc0b0f-6c59-4327-b8a8-5e7c5f8dfeac
名前 / ファイル | ライセンス | アクション |
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TE-PR-MORIMOTO-A-2130.pdf (683.6 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2022-01-20 | |||||
タイトル | ||||||
タイトル | Doping effect of oxygen or nitrogen impurity in hydrogenated amorphous silicon films | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
ID登録 | ||||||
ID登録 | 10.24517/00064703 | |||||
ID登録タイプ | JaLC | |||||
著者 |
Morimoto, Akiharu
× Morimoto, Akiharu× Matsumoto, Minoru× Yoshita, Masahiro× Kumeda, Minoru× Shimizu, Tatsuo |
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著者別表示 |
森本, 章治
× 森本, 章治× 久米田, 稔× 清水, 立生 |
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提供者所属 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 金沢大学設計製造技術研究所 / 金沢大学理工研究域電子情報通信学系 | |||||
書誌情報 |
Applied Physics Letters 巻 59, 号 17, p. 2130-2132, 発行日 1991 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0003-6951 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1077-3118 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00543431 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1063/1.106102 | |||||
出版者 | ||||||
出版者 | American Institute of Physics | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | O, N, or C impurity was separately incorporated into a-Si:H films by hot-wall glow discharge decomposition. The effect of the impurity incorporation was investigated by electrical and electron spin resonance measurements. Both O and N impurities were found to increase the dark conductivity by decreasing its activation energy in a-Si:H films. Furthermore, it was found that O and N impurities delay the photoresponse. C impurity, however, has no appreciable effect on them. These findings suggest that O and N impurities shift the Fermi level upward and form a trapping state for photoexcited electrons, supporting our O+3 and N+4 model. | |||||
権利 | ||||||
権利情報 | Copyright © American Institute of Physics | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://apl.aip.org/ | |||||
関連名称 | http://apl.aip.org/ |