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Thermally induced metastable defects in hydrogenated amorphous silicon and silicon-carbon alloy films
https://doi.org/10.24517/00064709
https://doi.org/10.24517/000647096b1e62b8-9930-47a3-bd2a-8ef54e1b1a01
名前 / ファイル | ライセンス | アクション |
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TE-PR-MORIMOTO-A-38.8371.pdf (311.2 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2022-01-24 | |||||
タイトル | ||||||
タイトル | Thermally induced metastable defects in hydrogenated amorphous silicon and silicon-carbon alloy films | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
ID登録 | ||||||
ID登録 | 10.24517/00064709 | |||||
ID登録タイプ | JaLC | |||||
著者 |
Xu, Xixiang
× Xu, Xixiang× Okumura, Akihisa× Morimoto, Akiharu× Kumeda, Minoru× Shimizu, Tatsuo |
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著者別表示 |
森本, 章治
× 森本, 章治× 久米田, 稔× 清水, 立生 |
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提供者所属 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 金沢大学設計製造技術研究所 / 金沢大学理工研究域電子情報通信学系 | |||||
書誌情報 |
Physical Review B 巻 38, 号 12, p. 8371-8376, 発行日 1988 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0021-8979 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1089-7550 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00693547 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1103/PhysRevB.38.8371 | |||||
出版者 | ||||||
出版者 | American Physical Society | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Thermally induced metastable defects in hydrogenated amorphous silicon (a-Si:H) and silicon-carbon alloy (a-Si1-xCx:H) films are studied by electron spin resonance (ESR) and conductivity measurements. We found that both undoped and P-doped a-Si1-xCx:H films exhibit thermal-equilibrium phenomena similar to those in a-Si:H although they have much higher defect densities. By heating the samples in situ during ESR measurements, we were able to directly observe the density of dangling bonds in both a-Si:H and a-Si1-xCx:H as the samples move from a frozen-in state into a temperature-dependent equilibrium. The influence of surface states and long-term drift of exposed surface on the thermal-equilibrium process has also been extensively investigated. © 1988 The American Physical Society. | |||||
権利 | ||||||
権利情報 | Copyright © American Physical Society | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://jap.aip.org/ | |||||
関連名称 | http://jap.aip.org/ |