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YAG高調波を利用したシリコンの微細加工: 熱変形法によって作製したマイクロレンズの加工光学系への応用
http://hdl.handle.net/2297/39088
http://hdl.handle.net/2297/39088813148fa-7960-4490-a382-19c16910fb3b
名前 / ファイル | ライセンス | アクション |
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TE-PR-UEDA-T-1283.pdf (6.0 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2017-10-03 | |||||
タイトル | ||||||
タイトル | YAG高調波を利用したシリコンの微細加工: 熱変形法によって作製したマイクロレンズの加工光学系への応用 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Micro Machining of Silicon by Second-Harmonic Pulsed Nd:YAG Laser: Application of Microlens Fabricated by Thermal Deformation Method as Optical System for Laser Machining | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
山田, 啓司
× 山田, 啓司× 加藤, 寛満× 上田, 隆司× 細川, 晃× 田中, 隆太郎 |
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書誌情報 |
精密工学会誌 = Journal of the Japan Society of Precision Engineering 巻 76, 号 11, p. 1283-1287, 発行日 2010-01-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0912-0289 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN1003250X | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.2493/jjspe.76.1283 | |||||
出版者 | ||||||
出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Micro machining of single-crystalline silicon is performed with the second-harmonic of Nd:YAG laser in this study. In experiments, various shapes of plastic microlens are fabricated on a transparent substrate by the developed die-less method. These microlenses are shaped by thermal deformation induced by the Er:YAG laser beam absorbable for the acrylate resin. And then, these lenses are used as optical devices to generate the local high energy density desired for machining of silicon in air and water. Machining characteristics are investigated in the single groove machining process, and the grid groove pattern and the herringbone pattern are formed to demonstrate the feasibility of proposed methods. | |||||
権利 | ||||||
権利情報 | Copyright © 2007 The Japan Society for Precision Engineering 精密工学会 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://www.jspe.or.jp/ | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.jstage.jst.go.jp/browse/jjspe | |||||
関連URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://ci.nii.ac.jp/naid/130000660578 |