WEKO3
インデックスリンク
アイテム
{"_buckets": {"deposit": "87ab3448-e71a-461b-bee0-bde7e9de7f34"}, "_deposit": {"created_by": 3, "id": "9720", "owners": [3], "pid": {"revision_id": 0, "type": "depid", "value": "9720"}, "status": "published"}, "_oai": {"id": "oai:kanazawa-u.repo.nii.ac.jp:00009720", "sets": ["936"]}, "author_link": ["12057", "14165", "9766"], "item_4_biblio_info_8": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1987-01-01", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "5", "bibliographicPageEnd": "2719", "bibliographicPageStart": "2713", "bibliographicVolumeNumber": "36", "bibliographic_titles": [{"bibliographic_title": "Physical Review -Series B-"}]}]}, "item_4_description_21": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "Fluorinated amorphous silicon (a-Si:F) films are prepared by three different methods: glow-discharge decomposition of SiF2 gas, magnetron sputtering, and conventional diode sputtering. The incorporation scheme of F atoms is investigated by means of nuclear magnetic resonance (NMR) and infrared (ir) absorption measurements. 19F NMR signals observed at 4.2 K can be simulated by superposing signals from dispersed F atoms, clustered F atoms, SiF4 molecules, and SiF3 species. The content of SiF4 increases by annealing in agreement with an increase in the intensity of ir absorption at 1020 cm-1. 19F NMR signals at 77 K and at room temperature show the effect of motional narrowing because SiF4 molecules move easily in the amorphous network.", "subitem_description_type": "Abstract"}]}, "item_4_publisher_17": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "American Institute of Physics"}]}, "item_4_relation_12": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isIdenticalTo", "subitem_relation_type_id": {"subitem_relation_type_id_text": "10.1103/PhysRevB.36.2713", "subitem_relation_type_select": "DOI"}}]}, "item_4_source_id_11": {"attribute_name": "NCID", "attribute_value_mlt": [{"subitem_source_identifier": "AA11289372", "subitem_source_identifier_type": "NCID"}]}, "item_4_source_id_9": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "1098-0121", "subitem_source_identifier_type": "ISSN"}]}, "item_4_version_type_25": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Kumeda, Minoru"}], "nameIdentifiers": [{"nameIdentifier": "9766", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "30019773", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://kaken.nii.ac.jp/ja/search/?qm=30019773"}, {"nameIdentifier": "30019773", "nameIdentifierScheme": "研究者番号", "nameIdentifierURI": "https://nrid.nii.ac.jp/nrid/1000030019773"}]}, {"creatorNames": [{"creatorName": "Takahashi, Yukio"}], "nameIdentifiers": [{"nameIdentifier": "14165", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Shimizu, Tatsuo"}], "nameIdentifiers": [{"nameIdentifier": "12057", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "30019715", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://kaken.nii.ac.jp/ja/search/?qm=30019715"}, {"nameIdentifier": "30019715", "nameIdentifierScheme": "研究者番号", "nameIdentifierURI": "https://nrid.nii.ac.jp/nrid/1000030019715"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2017-10-03"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "TE-PR-1987-KUMEDA-M-2713.pdf", "filesize": [{"value": "1.1 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 1100000.0, "url": {"label": "TE-PR-1987-KUMEDA-M-2713.pdf", "url": "https://kanazawa-u.repo.nii.ac.jp/record/9720/files/TE-PR-1987-KUMEDA-M-2713.pdf"}, "version_id": "3845a293-3e66-45e4-9c1e-5ba4c951a56d"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "Structure and morphology", "subitem_subject_scheme": "Other"}, {"subitem_subject": "thickness", "subitem_subject_scheme": "Other"}, {"subitem_subject": "crystalline orientation and texture", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Fluorine-incorporation scheme in fluorinated amorphous silicon prepared by various methods.", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Fluorine-incorporation scheme in fluorinated amorphous silicon prepared by various methods."}]}, "item_type_id": "4", "owner": "3", "path": ["936"], "permalink_uri": "http://hdl.handle.net/2297/24481", "pubdate": {"attribute_name": "公開日", "attribute_value": "2017-10-03"}, "publish_date": "2017-10-03", "publish_status": "0", "recid": "9720", "relation": {}, "relation_version_is_last": true, "title": ["Fluorine-incorporation scheme in fluorinated amorphous silicon prepared by various methods."], "weko_shared_id": -1}
Fluorine-incorporation scheme in fluorinated amorphous silicon prepared by various methods.
http://hdl.handle.net/2297/24481
http://hdl.handle.net/2297/24481855c5dc8-7407-4dee-b44f-e46257bfb44d
名前 / ファイル | ライセンス | アクション |
---|---|---|
TE-PR-1987-KUMEDA-M-2713.pdf (1.1 MB)
|
|
Item type | 学術雑誌論文 / Journal Article(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2017-10-03 | |||||
タイトル | ||||||
タイトル | Fluorine-incorporation scheme in fluorinated amorphous silicon prepared by various methods. | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Kumeda, Minoru
× Kumeda, Minoru× Takahashi, Yukio× Shimizu, Tatsuo |
|||||
書誌情報 |
Physical Review -Series B- 巻 36, 号 5, p. 2713-2719, 発行日 1987-01-01 |
|||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1098-0121 | |||||
NCID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA11289372 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1103/PhysRevB.36.2713 | |||||
出版者 | ||||||
出版者 | American Institute of Physics | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Fluorinated amorphous silicon (a-Si:F) films are prepared by three different methods: glow-discharge decomposition of SiF2 gas, magnetron sputtering, and conventional diode sputtering. The incorporation scheme of F atoms is investigated by means of nuclear magnetic resonance (NMR) and infrared (ir) absorption measurements. 19F NMR signals observed at 4.2 K can be simulated by superposing signals from dispersed F atoms, clustered F atoms, SiF4 molecules, and SiF3 species. The content of SiF4 increases by annealing in agreement with an increase in the intensity of ir absorption at 1020 cm-1. 19F NMR signals at 77 K and at room temperature show the effect of motional narrowing because SiF4 molecules move easily in the amorphous network. | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |