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YAG高調波を利用したシリコンの微細加工: 熱変形法によって作製したマイクロレンズの加工光学系への応用 Micro Machining of Silicon by Second-Harmonic Pulsed Nd:YAG Laser: Application of Microlens Fabricated by Thermal Deformation Method as Optical System for Laser Machining 50242532 山田, 啓司 加藤, 寛満 60115996 上田, 隆司 60432134 細川, 晃 60361979 田中, 隆太郎 Copyright © 2007 The Japan Society for Precision Engineering 精密工学会 Micro machining of single-crystalline silicon is performed with the second-harmonic of Nd:YAG laser in this study. In experiments, various shapes of plastic microlens are fabricated on a transparent substrate by the developed die-less method. These microlenses are shaped by thermal deformation induced by the Er:YAG laser beam absorbable for the acrylate resin. And then, these lenses are used as optical devices to generate the local high energy density desired for machining of silicon in air and water. Machining characteristics are investigated in the single groove machining process, and the grid groove pattern and the herringbone pattern are formed to demonstrate the feasibility of proposed methods. 精密工学会 = The Japan Society for Precision Engineering 2010-01-01 2017-10-03 jpn journal article VoR http://hdl.handle.net/2297/39088 https://kanazawa-u.repo.nii.ac.jp/records/9083 10.2493/jjspe.76.1283 http://www.jspe.or.jp/ https://www.jstage.jst.go.jp/browse/jjspe http://ci.nii.ac.jp/naid/130000660578 AN1003250X 0912-0289 精密工学会誌 = Journal of the Japan Society of Precision Engineering 76 11 1283 1287 https://kanazawa-u.repo.nii.ac.jp/record/9083/files/TE-PR-UEDA-T-1283.pdf application/pdf 6.0 MB 2017-10-03