@inproceedings{oai:kanazawa-u.repo.nii.ac.jp:00010009, author = {丸山, 武男 and 飯山, 宏一 and Inamoto, Makoto and Maruyama, Takeo and Iiyama, Koichi}, book = {9th International Conference on Numerical Simulation of Optoelectronic Devices, NUSOD 2009}, issue = {5297240}, month = {Jan}, note = {We propose a novel type Mach-Zehnder interferometric optical switching device using micro-electro mechanical systems (MEMS) as a phase shifter. As the analytical result, the amount of stretch length is 70nm at the applied voltage of 60 V per one phase shifter. The π-shift is achieved using cascade connections of 4-7 shifters. ©2009 IEEE., 9th International Conference on Numerical Simulation of Optoelectronic Devices, NUSOD 2009; Gwangju; 14 September 2009 through 17 September 2009; Category number CFP09817; Code 78843, 金沢大学理工研究域電子情報学系}, pages = {33--34}, publisher = {IEEE = Institute of Electrical and Electronics Engineers}, title = {Mach-Zehnder interferometric optical switch using MEMS phase shifter}, year = {2009} }