@article{oai:kanazawa-u.repo.nii.ac.jp:00010152,
 author = {古寺, 哲幸 and 安藤, 敏夫 and Kodera, Noriyuki and Yamashita, Hayato and Ando, Toshio},
 issue = {5},
 journal = {Review of Scientific Instruments},
 month = {May},
 note = {The scanner that moves the sample stage in three dimensions is a crucial device that limits the imaging rate of atomic force microscopy. This limitation derives mainly from the resonant vibrations of the scanner in the z direction (the most frequent scanning direction). Resonance originates in the scanner's mechanical structure as well as in the z piezoactuator itself. We previously demonstrated that the resonance originating in the structure can be minimized by a counterbalancing method. Here we report that the latter resonance from the actuator can be eliminated by an active damping method, with the result the bandwidth of the z scanner nearly reaches the first resonant frequency (150 kHz) of the z piezoactuator. © 2005 American Institute of Physics., 金沢大学ナノ生命科学研究所 / 金沢大学理工研究域数物科学系, 金沢大学理学部},
 pages = {053708-1--053708-5},
 title = {Active damping of the scanner for high-speed atomic force microscopy},
 volume = {76},
 year = {2005}
}