{"created":"2023-07-27T06:44:23.615747+00:00","id":34600,"links":{},"metadata":{"_buckets":{"deposit":"056caa4f-b7bf-41da-a028-52dcca5ca064"},"_deposit":{"created_by":3,"id":"34600","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"34600"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00034600","sets":["2812:2813:2822"]},"author_link":["2884","70211"],"item_9_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2012-04-04","bibliographicIssueDateType":"Issued"},"bibliographicPageStart":"6p.","bibliographicVolumeNumber":"2009-2011","bibliographic_titles":[{"bibliographic_title":"平成23(2011)年度 科学研究費補助金 基盤研究(B) 研究成果報告書"},{"bibliographic_title":"2011 Fiscal Year Final Research Report","bibliographic_titleLang":"en"}]}]},"item_9_creator_33":{"attribute_name":"著者別表示","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{}],"nameIdentifiers":[{},{},{}]}]},"item_9_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"振動下にある垂直走査型干渉計の光路差変化をレーザでリアルタイムかつ高速高精度に計測する手法を開発し,変化情報を基に一定の位相変化終了後毎にLED光を瞬間点灯させ干渉縞を撮影した.この手法で計測した形状結果を分析しさらなる高精度化には点灯 & 露光中に加わる振動もその影響を補正する必要を見出し,露光中の光路差変化履歴を基に振動影響を補正して位相を抽出する方法も開発し,その効果を実験で確認した.","subitem_description_type":"Abstract"},{"subitem_description":"We have developed a new measurement technique for nm-level change of an optical-path-deference(OPD) using laser. This technique can measure OPD of a vertical-scan interference microscope real time and high speed. With the technique we can trigger LED flashings and interferogram exposures right after predefined phase changes even under vertical vibrations. Analyzing the measured 3D-shape obtained with the technique results in that affects of vibration during the exposure should be corrected for higher precision shape measurement. Then we have developed another technique which can extract interference phase just on the exposure-start moment from vibration-affected interferogram intensities and history of OPD changes during the exposure. Validity of the developed technique is proved by experiments using the vertical-scan interference microscope with intentionally generated pulse-like vibration.","subitem_description_type":"Abstract"}]},"item_9_description_22":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"研究課題/領域番号:21360115, 研究期間(年度):2009–2011","subitem_description_type":"Other"},{"subitem_description":"出典：研究課題「振動下でも使用できる超高精度3次元形状計測技術の開発」課題番号21360115\n（KAKEN：科学研究費助成事業データベース（国立情報学研究所）） \n（https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-21360115/21360115seika/）を加工して作成","subitem_description_type":"Other"}]},"item_9_description_5":{"attribute_name":"提供者所属","attribute_value_mlt":[{"subitem_description":"金沢大学理工研究域機械工学系","subitem_description_type":"Other"}]},"item_9_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24517/00034587","subitem_identifier_reg_type":"JaLC"}]},"item_9_relation_28":{"attribute_name":"関連URI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/search/?qm=50212519","subitem_relation_type_select":"URI"}},{"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-21360115/","subitem_relation_type_select":"URI"}},{"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-21360115/21360115seika/","subitem_relation_type_select":"URI"}}]},"item_9_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_ab4af688f83e57aa","subitem_version_type":"AM"}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-10-05"}],"displaytype":"detail","filename":"TE-PR-ADACHI-M-kaken 2012-6p.pdf","filesize":[{"value":"448.3 kB"}],"format":"application/pdf","licensetype":"license_11","mimetype":"application/pdf","url":{"label":"TE-PR-ADACHI-M-kaken 2012-6p.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/34600/files/TE-PR-ADACHI-M-kaken 2012-6p.pdf"},"version_id":"12d518f7-cb22-409b-9242-43e2089819ec"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"research report","resourceuri":"http://purl.org/coar/resource_type/c_18ws"}]},"item_title":"振動下でも使用できる超高精度3次元形状計測技術の開発","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"振動下でも使用できる超高精度3次元形状計測技術の開発"},{"subitem_title":"Ultrahigh-precision 3D-shape measurement technique usable under vertical vibration","subitem_title_language":"en"}]},"item_type_id":"9","owner":"3","path":["2822"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-10-05"},"publish_date":"2017-10-05","publish_status":"0","recid":"34600","relation_version_is_last":true,"title":["振動下でも使用できる超高精度3次元形状計測技術の開発"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-07-27T13:30:00.013649+00:00"}