{"created":"2023-07-27T06:44:27.580481+00:00","id":34690,"links":{},"metadata":{"_buckets":{"deposit":"73ce79dc-33b1-4347-a3cf-7493541d5e46"},"_deposit":{"created_by":3,"id":"34690","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"34690"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00034690","sets":["2812:2813:2825"]},"author_link":["399","70211"],"item_9_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2009-04-10","bibliographicIssueDateType":"Issued"},"bibliographicPageStart":"4p.","bibliographicVolumeNumber":"2006-2008","bibliographic_titles":[{"bibliographic_title":"平成20(2008)年度 科学研究費補助金 基盤研究(C) 研究成果報告書"},{"bibliographic_title":"2008 Fiscal Year Final Research Report","bibliographic_titleLang":"en"}]}]},"item_9_creator_33":{"attribute_name":"著者別表示","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{}],"nameIdentifiers":[{},{},{}]}]},"item_9_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"垂直走査型の白色干渉形状測定法では装置と測定対象を一定間隔に保ち, 測定ヘッドを数十nmステップで近づけながら, 毎回干渉像を記録する必要があり, 振動環境下では使用不可能だった. 開発した手法では垂直走査型白色干渉顕微鏡内にレ-ザ光を持ち込み, 白色光と同軸で被測定面に照射し, レ-ザ干渉像を高速ラインカメラで取り込む. この干渉像をFPGAで高速処理し光路差変化をnm精度で抽出して, 撮影が必要となる光路差のタイミングで白色光をフラッシュさせることで, 振動環境下でも段差を持つ微細構造物の3次元形状を高精度に測定できるようになった.","subitem_description_type":"Abstract"}]},"item_9_description_22":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"研究課題/領域番号:18560247, 研究期間(年度):2006–2008","subitem_description_type":"Other"},{"subitem_description":"出典：「上下振動している微細構造物の高精度3次元形状測定法の開発」研究成果報告書　課題番号18560247\n  (KAKEN：科学研究費助成事業データベース（国立情報学研究所）)\n（https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-18560247/18560247seika/)を加工して作成","subitem_description_type":"Other"}]},"item_9_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24517/00034677","subitem_identifier_reg_type":"JaLC"}]},"item_9_publisher_17":{"attribute_name":"公開者","attribute_value_mlt":[{"subitem_publisher":"金沢大学機械工学系"}]},"item_9_relation_28":{"attribute_name":"関連URI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/search/?qm=50212519","subitem_relation_type_select":"URI"}},{"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-18560247/","subitem_relation_type_select":"URI"}},{"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-18560247/18560247seika/","subitem_relation_type_select":"URI"}}]},"item_9_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_ab4af688f83e57aa","subitem_version_type":"AM"}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-10-05"}],"displaytype":"detail","filename":"TE-PR-ADACHI-M-kaken 2009-4p.pdf","filesize":[{"value":"387.7 kB"}],"format":"application/pdf","licensetype":"license_11","mimetype":"application/pdf","url":{"label":"TE-PR-ADACHI-M-kaken 2009-4p.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/34690/files/TE-PR-ADACHI-M-kaken 2009-4p.pdf"},"version_id":"df51fc06-9e2e-484d-86bf-2a7b5b0f2edd"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"research report","resourceuri":"http://purl.org/coar/resource_type/c_18ws"}]},"item_title":"上下振動している微細構造物の高精度3次元形状測定法の開発","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"上下振動している微細構造物の高精度3次元形状測定法の開発"},{"subitem_title":"3D-shape measurement method of a small object vibrating vertically","subitem_title_language":"en"}]},"item_type_id":"9","owner":"3","path":["2825"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-10-05"},"publish_date":"2017-10-05","publish_status":"0","recid":"34690","relation_version_is_last":true,"title":["上下振動している微細構造物の高精度3次元形状測定法の開発"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-07-27T14:16:17.908131+00:00"}