@article{oai:kanazawa-u.repo.nii.ac.jp:00039995, author = {福間, 剛士 and 淺川, 雅 and Fukuma, Takeshi and Onishi, K. and Kobayashi, N. and Matsuki, A. and Asakawa, Hitoshi}, issue = {13}, journal = {Nanotechnology}, month = {Apr}, note = {In this study, we have investigated the performance of liquid-environment FM-AFM with various cantilevers having different dimensions from theoretical and experimental aspects. The results show that reduction of the cantilever dimensions provides improvement in the minimum detectable force as long as the tip height is sufficiently long compared with the width of the cantilever. However, we also found two important issues to be overcome to achieve this theoretically expected performance. The stable photothermal excitation of a small cantilever requires much higher pointing stability of the exciting laser beam than that for a long cantilever. We present a way to satisfy this stringent requirement using a temperature controlled laser diode module and a polarization-maintaining optical fiber. Another issue is associated with the tip. While a small carbon tip formed by electron beam deposition (EBD) is desirable for small cantilevers, we found that an EBD tip is not suitable for atomic-scale applications due to the weak tipsample interaction. Here we show that the tipsample interaction can be greatly enhanced by coating the tip with Si. With these improvements, we demonstrate atomic-resolution imaging of mica in liquid using a small cantilever with a megahertz-order resonance frequency. In addition, we experimentally demonstrate the improvement in the minimum detectable force obtained by the small cantilever in measurements of oscillatory hydration forces. © 2012 IOP Publishing Ltd., 金沢大学ナノ生命科学研究所}, title = {Atomic-resolution imaging in liquid by frequency modulation atomic force microscopy using small cantilevers with megahertz-order resonance frequencies}, volume = {23}, year = {2012} }