@article{oai:kanazawa-u.repo.nii.ac.jp:00040022, author = {久保, 守 and 村本, 健一郎 and 福間, 剛士 and Mitani, Yuji and Kubo, Mamoru and Muramoto, Ken-ichiro and Fukuma, Takeshi}, issue = {8}, journal = {Review of Scientific Instruments}, month = {Jan}, note = {We have developed a wideband digital frequency detector for high-speed frequency modulation atomic force microscopy (FM-AFM). We used a subtraction-based phase comparator (PC) in a phase-locked loop circuit instead of a commonly used multiplication-based PC, which has enhanced the detection bandwidth to 100 kHz. The quantitative analysis of the noise performance revealed that the internal noise from the developed detector is small enough to provide the theoretically limited noise performance in FM-AFM experiments in liquid. FM-AFM imaging of mica in liquid was performed with the developed detector, showing its stability and applicability to true atomic-resolution imaging in liquid. © 2009 American Institute of Physics., 金沢大学フロンティアサイエンス機構}, title = {Wideband digital frequency detector with subtraction-based phase comparator for frequency modulation atomic force microscopy}, volume = {80}, year = {2009} }