{"created":"2023-07-27T06:50:06.860165+00:00","id":42597,"links":{},"metadata":{"_buckets":{"deposit":"83f652c2-33da-4af6-960c-eeb5f4438af9"},"_deposit":{"created_by":18,"id":"42597","owners":[18],"pid":{"revision_id":0,"type":"depid","value":"42597"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00042597","sets":["2812:2813:2842"]},"author_link":["67998","67997"],"item_10007_biblio_info_24":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicPageStart":"89p.","bibliographicVolumeNumber":"1990-1991","bibliographic_titles":[{"bibliographic_title":"平成3(1991)年度 科学研究費補助金 一般研究(C) 研究成果報告書"},{"bibliographic_title":"1991 Fiscal Year Final Research Report","bibliographic_titleLang":"en"}]}]},"item_10007_date_8":{"attribute_name":"報告年度","attribute_value_mlt":[{"subitem_date_issued_datetime":"1992-03","subitem_date_issued_type":"Issued"}]},"item_10007_description_13":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"クリ-ンル-ム配管系あるいは各種壁からの微小粒子の発塵現象を明らかにするため、ダクト内に沈着した粒子の気流による飛散実験を行なった。その後、外乱による壁面からの微粒子の飛散現象を積極的に利用して、ウエハに付着した粒子を飛散させ清浄な表面を得る乾式洗浄技術について検討した。以下に、得られた結果を示す。\n1.ダクト内に沈着した1μm以下の微小粒子は、定常流の場合では気流速度が100m/s以上になってもほとんど飛散しないが、表面の突起部に沈着した粒子や凝集粒子ではこの気流速度以下でも飛散する。\n2.定常流では飛散しないような微小粒子も、気流に急激な速度変動が生じた場合には飛散する。\n3.エアジェットを表面に当てた場合、粒子の飛散はエアジェットが表面に衝突した瞬間に起こり、その後のジェットの噴射時間にはほとんど影響されない。このため、各種表面の洗浄には気流をパルス的に繰り返し当てるパルスジェットが有効である。\n4.パルスエアジェットによる粒子の飛散率は、パルスジェット噴射回数が増加するにつれて大きくなり、0.25μmとかなり微小な粒子でも噴射回数を多くすればほぼ完全にウエハ表面から除去できる。\n5.表面にパルスエアジェットを繰り返し噴射した場合、パルス1回あたりの飛散率、すなわち、ジェット噴射前後の付着粒子数の比は、ジェットの噴射回数によらず常に一定に保たれる。\n6.パルスエアジェットによる粒子の飛散は、ジェット気流を噴射した際に生じる圧力波の立ち上がりに大きく依存する。したがって、飛散率を大きくするためには、ノズル形状を工夫して急峻な圧力の立ち上がりをもつエアジェットを作る必要がある。","subitem_description_type":"Abstract"},{"subitem_description":"Resuspension of submicron particles from a duct wall by air stream was studied to clarify the detachment mechanisms of fine particles from various tubings and surfaces in clean room. Although the resuspension of particles in clean room leads to the contamination of products, the resuspension phenomena of particles by pulse air jet was investigated to develop dry wafer surface cleaning method. The followings are the main conclusions obtained in the present work.\n(1) Fine particles with diameter less than 1mum would not be resuspended by a steady air stream with velocity of over 100 m/s, but those which deposited at a bump of the wall or the aggregates of these particles could be detached from the surface at a lower airflow velocity.\n(2) Abrupt change in airflow velocity leads to particle reentrainment.\n(3) Sequence of pulse air jets is effective for the removal of fine particles from after surface because particle detachment takes place the moment air jet hits the surface.\n(4) Continual exposure of wafer surface to air jets brings complete removal of particles with diameter of 0.25mum.\n(5) Fraction of particles reentrained per pulse of air jet does not change in the sequence of the pulse air jets.\n(6) Particle removal efficiency from wafer surface by pulse air jets mostly depends on the air pressure rise at the collision of air jet on the surface.","subitem_description_type":"Abstract"}]},"item_10007_description_14":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"研究課題/領域番号:02650681, 研究期間(年度):1990-1991","subitem_description_type":"Other"},{"subitem_description":"研究機関: 金沢大学工学部","subitem_description_type":"Other"},{"subitem_description":"出典：「種々の外乱によるサブミクロン粒子の壁からの発塵」研究成果報告書　課題番号02650681\n(KAKEN：科学研究費助成事業データベース（国立情報学研究所）)\n　　　本文データは著者版報告書より作成","subitem_description_type":"Other"}]},"item_10007_description_4":{"attribute_name":"研究代表者ID","attribute_value_mlt":[{"subitem_description":"90025966","subitem_description_type":"Other"}]},"item_10007_description_9":{"attribute_name":"研究課題番号","attribute_value_mlt":[{"subitem_description":"02650681","subitem_description_type":"Other"}]},"item_10007_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24517/00048952","subitem_identifier_reg_type":"JaLC"}]},"item_10007_relation_17":{"attribute_name":"関連サイト","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/search/?qm=90025966"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/search/?qm=90025966","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02650681/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02650681/","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-02650681/026506811991kenkyu_seika_hokoku_gaiyo/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-02650681/026506811991kenkyu_seika_hokoku_gaiyo/","subitem_relation_type_select":"URI"}}]},"item_10007_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_ab4af688f83e57aa","subitem_version_type":"AM"}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-11-16"}],"displaytype":"detail","filename":"TE-PR-EMI-Ｈ-kaken 1992-89p.pdf","filesize":[{"value":"3.0 MB"}],"format":"application/pdf","licensetype":"license_11","mimetype":"application/pdf","url":{"label":"TE-PR-EMI-Ｈ-kaken 1992-89p.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/42597/files/TE-PR-EMI-Ｈ-kaken 1992-89p.pdf"},"version_id":"0cdbafa6-d303-4e2f-b364-fcfe1720fa0f"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"微粒子","subitem_subject_scheme":"Other"},{"subitem_subject":"再飛散","subitem_subject_scheme":"Other"},{"subitem_subject":"パルスエアジェット","subitem_subject_scheme":"Other"},{"subitem_subject":"表面洗浄","subitem_subject_scheme":"Other"},{"subitem_subject":"発塵","subitem_subject_scheme":"Other"},{"subitem_subject":"Wafer","subitem_subject_scheme":"Other"},{"subitem_subject":"Fine Particles","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Reentrainment","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Pulse air jet","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Surface cleaning","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Resuspension","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Wafer","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_researcher":{"attribute_name":"研究代表者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"江見, 準"}],"nameIdentifiers":[{"nameIdentifier":"67997","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"90025966","nameIdentifierScheme":"e-Rad","nameIdentifierURI":"https://kaken.nii.ac.jp/ja/search/?qm=90025966"}]},{"creatorNames":[{"creatorName":"Emi, Hitoshi"}],"nameIdentifiers":[{"nameIdentifier":"67998","nameIdentifierScheme":"WEKO"}]}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"research report","resourceuri":"http://purl.org/coar/resource_type/c_18ws"}]},"item_title":"種々の外乱によるサブミクロン粒子の壁からの発塵","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"種々の外乱によるサブミクロン粒子の壁からの発塵"},{"subitem_title":"Resuspension of submicron Particles by Various Disturbances","subitem_title_language":"en"}]},"item_type_id":"10007","owner":"18","path":["2842"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-11-16"},"publish_date":"2017-11-16","publish_status":"0","recid":"42597","relation_version_is_last":true,"title":["種々の外乱によるサブミクロン粒子の壁からの発塵"],"weko_creator_id":"18","weko_shared_id":-1},"updated":"2023-07-27T14:51:59.599451+00:00"}