{"created":"2023-07-27T06:50:06.904878+00:00","id":42598,"links":{},"metadata":{"_buckets":{"deposit":"f3bc8957-32c5-4010-aff1-8e9ff2497d6d"},"_deposit":{"created_by":18,"id":"42598","owners":[18],"pid":{"revision_id":0,"type":"depid","value":"42598"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00042598","sets":["2812:2813:2844"]},"author_link":["67999","67984"],"item_10007_biblio_info_24":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicPageStart":"52p.","bibliographicVolumeNumber":"1987-1988","bibliographic_titles":[{"bibliographic_title":"平成1(1989)年度 科学研究費補助金 一般研究(B) 研究成果報告書"},{"bibliographic_title":"1989 Fiscal Year Final Research Report","bibliographic_titleLang":"en"}]}]},"item_10007_date_8":{"attribute_name":"報告年度","attribute_value_mlt":[{"subitem_date_issued_datetime":"1990-03","subitem_date_issued_type":"Issued"}]},"item_10007_description_13":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"精密加工技術の進歩と共に、製品の歩留りを上げるために、より高度な清浄空間が要求され、クリ-ンル-ムでは従来のHEPAフィルタ-よりさらに集塵性能の優れたULPAフィルタ-がス-パ-クリ-ンル-ムに用いられるようになった。さらに、半導体プロセスガス供給ラインには、上記フィルタ-より捕集効率が数桁高いメンブレンフィルタ-が使用されている。このように捕集効率が現場の要求を満たすに十分な値に達っした現段階では、集塵性能のもう一つの指標である圧力損失をいかに低く抑えるかが、省エネの面からこれからの課題となっている。本研究では以上の観点から、捕集効率と圧力損失を同時に考慮に入れた集塵性能評価の指標I=lnP/Δp(Pは粒子透過率、Δpは圧力損失)を導入し、繊維層フィルタ-およびメンブレンフィルタ-の内部構造の集塵性能に及ぼす影響を検討した。さらに省エネ型フィルタ-として、将来の実用化が期待されているエレクトレットフィルタ-の性能と安定性についても理論と実験の両面から考察した。\nその結果、繊維層については、繊維径が小さいほど、また流れに平行配列の繊維が多いほど、さらにフィルタ-強度を保つために混入されているバインダ量が少ないほど、I値が大きく性能が向上することがわかった。またメンブレンについては、その構造を多孔状から繊維状まで5種類に大別し性能を測定したところ、構造が多孔状から繊維状に移行するにつれI値が大きくなることがわがった。またこれまで解明されていない捕集効率推定に関しては、通路モデルを導入することにより現象をうまく説明できることがわかった。さらにエレクトレットフィルタ-に関しては、初期捕集効率の推定法を確立すると共に、長時間使用による効率低下の傾向を実験的に示し、温度や大気塵に対しては安定であること、有機性ミストに対しては効率低下が著しいことなどがわかった。","subitem_description_type":"Abstract"},{"subitem_description":"With increasing demand for highly-purified space in high-tech industry, ULPA (Ultra low Penetration Air) filters have been used in clean rooms in place of the conventional HEPA (High Efficiency Particulate Air) filters. Further, in semiconductor industry, membrane filters which have collection efficiency much higher than the ULPA and HEPA are currently used to eliminate particulate matter from pressurized process gases.\nUnder these present situations, the next requirement for these air filters is to reduce their pressure drop without sacrificing their high collection efficiency.\nIn the present work, an index for filter performance, defined as the ratio of logarithm of particle penetration to pressure drop was introduced to evaluate collection performance of various air filters by taking account of both the filter collection efficiency and the pressure drop. On the basis of the filter performance index, the influence of filter structure of fibrous and membrane filters on the collection pe rformance was investigated. Furthermore, the collection performance of electret filter which utilizes electrostatic Charge to collect particles was evaluated in order to examine whether it can be used as an economical high collection performance air filter.\nAs a result, it was found that the collection performance of fibrous air filter can be improved (1) by reducing the fiber diameter, (2) by increasing the fraction of fibers which lie parallel to airflow direction, and (3) by reducing the amount of binder. Concerning the membrane filters, we classified them into five groups according to their structure, and found that the membrane filters with fiber-like structure have a higher collection performance than those with pore-like structure. Further, the collection efficiency of membrane filters with a relatively high-packing density was predicted by a newly proposed model based on internal flow collection model. Concerning the collection performance of electret filters, we presented a theoretical model to calculate initial collection efficiency, and experimentally showed that the electret charge on the elect fiber is stable in humid air and that the collection efficiency for solid and atmospheric particles do not decrease with dust load. However, when the electret filter was used for organic mist particles, the charge was neutralized in a short time, leading to a significant decrease in the collection efficiency.","subitem_description_type":"Abstract"}]},"item_10007_description_14":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"研究課題/領域番号:62470106, 研究期間(年度):1987-1988","subitem_description_type":"Other"},{"subitem_description":"研究機関: 金沢大学工学部","subitem_description_type":"Other"},{"subitem_description":"出典：「省エネルギー型超高性能エアフィルターの開発」研究成果報告書　課題番号62470106\n  (KAKEN：科学研究費助成事業データベース（国立情報学研究所）)\n　　　本文データは著者版報告書より作成","subitem_description_type":"Other"}]},"item_10007_description_4":{"attribute_name":"研究代表者ID","attribute_value_mlt":[{"subitem_description":"90025966","subitem_description_type":"Other"}]},"item_10007_description_9":{"attribute_name":"研究課題番号","attribute_value_mlt":[{"subitem_description":"62470106","subitem_description_type":"Other"}]},"item_10007_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24517/00048953","subitem_identifier_reg_type":"JaLC"}]},"item_10007_relation_17":{"attribute_name":"関連サイト","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/search/?qm=90025966"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/search/?qm=90025966","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-62470106/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-62470106/","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-62470106/624701061989kenkyu_seika_hokoku_gaiyo/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-62470106/624701061989kenkyu_seika_hokoku_gaiyo/","subitem_relation_type_select":"URI"}}]},"item_10007_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_ab4af688f83e57aa","subitem_version_type":"AM"}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-11-16"}],"displaytype":"detail","filename":"TE-PR-EMI-Ｈ-kaken 1990-52p.pdf","filesize":[{"value":"1.5 MB"}],"format":"application/pdf","licensetype":"license_11","mimetype":"application/pdf","url":{"label":"TE-PR-EMI-Ｈ-kaken 1990-52p.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/42598/files/TE-PR-EMI-Ｈ-kaken 1990-52p.pdf"},"version_id":"0881c1b8-e1da-4ee8-bf9a-0a0372f4d91d"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"超高性能エアフィルタ-","subitem_subject_scheme":"Other"},{"subitem_subject":"低圧力損失","subitem_subject_scheme":"Other"},{"subitem_subject":"繊維径","subitem_subject_scheme":"Other"},{"subitem_subject":"繊維配向","subitem_subject_scheme":"Other"},{"subitem_subject":"エレクトレットフィルタ-","subitem_subject_scheme":"Other"},{"subitem_subject":"経時変化","subitem_subject_scheme":"Other"},{"subitem_subject":"メンブレンフィルタ-","subitem_subject_scheme":"Other"},{"subitem_subject":"Air filter","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"High collection performance","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Fiber diameter","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Fiber orientation","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Electret filter","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Time dependency","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Membrane filter","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_researcher":{"attribute_name":"研究代表者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"江見, 準"}],"nameIdentifiers":[{"nameIdentifier":"67999","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"90025966","nameIdentifierScheme":"e-Rad","nameIdentifierURI":"https://kaken.nii.ac.jp/ja/search/?qm=90025966"}]},{"creatorNames":[{"creatorName":"Emi, Hitoshi"}],"nameIdentifiers":[{"nameIdentifier":"67984","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"90025966","nameIdentifierScheme":"e-Rad","nameIdentifierURI":"https://kaken.nii.ac.jp/ja/search/?qm=90025966"}]}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"research report","resourceuri":"http://purl.org/coar/resource_type/c_18ws"}]},"item_title":"省エネルギー型超高性能エアフィルターの開発","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"省エネルギー型超高性能エアフィルターの開発"},{"subitem_title":"Development of economical air filters with high collection performance","subitem_title_language":"en"}]},"item_type_id":"10007","owner":"18","path":["2844"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-11-16"},"publish_date":"2017-11-16","publish_status":"0","recid":"42598","relation_version_is_last":true,"title":["省エネルギー型超高性能エアフィルターの開発"],"weko_creator_id":"18","weko_shared_id":-1},"updated":"2023-07-27T11:29:04.658986+00:00"}