{"created":"2023-07-27T06:50:38.939218+00:00","id":43646,"links":{},"metadata":{"_buckets":{"deposit":"2ae2f040-3903-49f0-98fc-3d7931dc3493"},"_deposit":{"created_by":18,"id":"43646","owners":[18],"pid":{"revision_id":0,"type":"depid","value":"43646"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00043646","sets":["934:935:936"]},"author_link":["70211","71572","71571","70213","71592","71591"],"item_4_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2009","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"G34","bibliographicPageEnd":"496","bibliographicPageStart":"495","bibliographicVolumeNumber":"2009 Autumn","bibliographic_titles":[{"bibliographic_title":"精密工学会学術講演会講演論文集"},{"bibliographic_title":"2009 JSPE Autumn Meeting","bibliographic_titleLang":"en"}]}]},"item_4_creator_33":{"attribute_name":"著者別表示","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Adachi, Masaaki"}],"nameIdentifiers":[{},{},{}]},{"creatorNames":[{"creatorName":"Kawamura, Masanori"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Iwao, Yuuta"}],"nameIdentifiers":[{}]}]},"item_4_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"垂直走査型干渉顕微鏡を用いる形状計測法は外部振動の影響を極めて受けやすい．我々は，外部振動の影響を受けない形状測定法の開発を目指して，測定対象とする粗面が作る干渉像の垂直走査に伴う変化から，干渉計の光路差変化量を高精度に測定する方法を研究して来た．そして，粗面でも光路差変化量が測定可能であることを確認した．今回は，用いる対物レンズの開口の大きさの測定値への影響を実験的に調べたので報告する.","subitem_description_type":"Abstract"}]},"item_4_description_22":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"出版者照会後に全文公開","subitem_description_type":"Other"}]},"item_4_description_5":{"attribute_name":"提供者所属","attribute_value_mlt":[{"subitem_description":"金沢大学理工研究域機械工学系","subitem_description_type":"Other"}]},"item_4_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24517/00049988","subitem_identifier_reg_type":"JaLC"}]},"item_4_publisher_17":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"精密工学会 = The Japan Society for Precision Engineering"}]},"item_4_relation_11":{"attribute_name":"NCID","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"BA90159927","subitem_relation_type_select":"NCID"}}]},"item_4_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"10.11522/pscjspe.2009A.0.495.0","subitem_relation_type_select":"DOI"}}]},"item_4_relation_28":{"attribute_name":"関連URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"http://www.jspe.or.jp/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"http://www.jspe.or.jp/","subitem_relation_type_select":"URI"}}]},"item_4_rights_23":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright © The Japan Society for Precision Engineering"}]},"item_4_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"安達, 正明"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"河村, 昌範"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"岩尾, 雄太"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-06-15"}],"displaytype":"detail","filename":"TE-PR-ADACHI-M-495.pdf","filesize":[{"value":"1.1 MB"}],"format":"application/pdf","licensetype":"license_11","mimetype":"application/pdf","url":{"label":"TE-PR-ADACHI-M-495.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/43646/files/TE-PR-ADACHI-M-495.pdf"},"version_id":"7608d2b0-e1f1-4ac1-816e-fa1acf2bf666"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"干渉顕微鏡観察下の粗面の垂直変位測定(第2報）","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"干渉顕微鏡観察下の粗面の垂直変位測定(第2報）"},{"subitem_title":"Vertical-displacement measurement of a rough surface observed by an interference microscope (Second report)","subitem_title_language":"en"}]},"item_type_id":"4","owner":"18","path":["936"],"pubdate":{"attribute_name":"公開日","attribute_value":"2018-06-15"},"publish_date":"2018-06-15","publish_status":"0","recid":"43646","relation_version_is_last":true,"title":["干渉顕微鏡観察下の粗面の垂直変位測定(第2報）"],"weko_creator_id":"18","weko_shared_id":-1},"updated":"2023-07-27T17:03:28.713862+00:00"}