{"created":"2023-07-27T06:50:40.011435+00:00","id":43670,"links":{},"metadata":{"_buckets":{"deposit":"c373d18c-580c-4fb1-b420-e74b39a05a94"},"_deposit":{"created_by":18,"id":"43670","owners":[18],"pid":{"revision_id":0,"type":"depid","value":"43670"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00043670","sets":["2438:4190:4191"]},"author_link":["71363","73509","71368","71715","71644","71711","71713","71651","71712","73508"],"item_4_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2016","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"E80","bibliographicPageEnd":"376","bibliographicPageStart":"375","bibliographicVolumeNumber":"2016 Spring","bibliographic_titles":[{"bibliographic_title":"精密工学会学術講演会講演論文集"},{"bibliographic_title":"2016 JSPE Spring Conference","bibliographic_titleLang":"en"}]}]},"item_4_creator_33":{"attribute_name":"著者別表示","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Hashimoto, Yohei"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"Kadono, Ryota"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Furumoto, Tatsuaki"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"Kayano, Tomohiro"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Hosokawa, Akira"}],"nameIdentifiers":[{},{},{},{}]}]},"item_4_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"ウェハ製造に用いられる両面研磨加工において,加工現象の理解に重要であるウェハ挙動は未だ解明されていない.これに対し,本研究では,ウェハと上下の定盤,キャリアとの接触により生じる力とモーメントのつりあいに着目した,ウェハ挙動の解析技術の開発を行う.本報では,上下の定盤との接触により生じる圧力分布を一様とした条件において解析を行い,研磨条件によるウェハ挙動の違いを明らかにする.","subitem_description_type":"Abstract"}]},"item_4_description_22":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"出版者照会後に全文公開","subitem_description_type":"Other"}]},"item_4_description_5":{"attribute_name":"提供者所属","attribute_value_mlt":[{"subitem_description":"金沢大学理工研究域機械工学系","subitem_description_type":"Other"}]},"item_4_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24517/00050012","subitem_identifier_reg_type":"JaLC"}]},"item_4_publisher_17":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"精密工学会 = The Japan Society for Precision Engineering"}]},"item_4_relation_11":{"attribute_name":"NCID","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"BA90159927","subitem_relation_type_select":"NCID"}}]},"item_4_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"10.11522/pscjspe.2016S.0_375","subitem_relation_type_select":"DOI"}}]},"item_4_relation_28":{"attribute_name":"関連URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"http://www.jspe.or.jp/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"http://www.jspe.or.jp/","subitem_relation_type_select":"URI"}}]},"item_4_rights_23":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright © The Japan Society for Precision Engineering"}]},"item_4_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"橋本, 洋平"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"近藤, 亮太"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"古本, 達明"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"小谷野, 智広"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"細川, 晃"}],"nameIdentifiers":[{},{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-06-15"}],"displaytype":"detail","filename":"TE-PR-HASHIMOTO-Y-375.pdf","filesize":[{"value":"699.5 kB"}],"format":"application/pdf","licensetype":"license_11","mimetype":"application/pdf","url":{"label":"TE-PR-HASHIMOTO-Y-375.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/43670/files/TE-PR-HASHIMOTO-Y-375.pdf"},"version_id":"1a90d1ec-4ea5-4c80-b6ea-75a8ce23757d"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"両面研磨におけるウェハ挙動の解析技術の開発","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"両面研磨におけるウェハ挙動の解析技術の開発"},{"subitem_title":"Development of analysis model of wafer behavior in double-side polishing","subitem_title_language":"en"}]},"item_type_id":"4","owner":"18","path":["4191"],"pubdate":{"attribute_name":"公開日","attribute_value":"2018-06-15"},"publish_date":"2018-06-15","publish_status":"0","recid":"43670","relation_version_is_last":true,"title":["両面研磨におけるウェハ挙動の解析技術の開発"],"weko_creator_id":"18","weko_shared_id":-1},"updated":"2023-07-27T10:31:42.435072+00:00"}