{"created":"2023-07-27T06:51:59.223329+00:00","id":45643,"links":{},"metadata":{"_buckets":{"deposit":"95b2148d-1b87-4e03-8c39-8f0be2b7131a"},"_deposit":{"created_by":18,"id":"45643","owners":[18],"pid":{"revision_id":0,"type":"depid","value":"45643"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00045643","sets":["2812:2813:2817"]},"author_link":["79278","10071"],"item_9_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2017-06-06","bibliographicIssueDateType":"Issued"},"bibliographicPageStart":"5p.","bibliographicVolumeNumber":"2014-04-01 - 2017-03-31","bibliographic_titles":[{"bibliographic_title":"平成28(2016)年度 科学研究費補助金 基盤研究(C) 研究成果報告書"},{"bibliographic_title":"2016 Fiscal Year Final Research Report","bibliographic_titleLang":"en"}]}]},"item_9_creator_33":{"attribute_name":"著者別表示","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Haruki, Masashi"}],"nameIdentifiers":[{"nameIdentifier":"10071","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"90432682","nameIdentifierScheme":"e-Rad","nameIdentifierURI":"https://kaken.nii.ac.jp/ja/search/?qm=90432682"}]}]},"item_9_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"超臨界二酸化炭素を利用した新しい蒸着重合技術の基板構築に取り組んだ。その結果、フッ素系モノマーである2,2-bis(3,4-anhydrodicarboxyphenyl)-hexafluoropropane（6FDA）と2,2’-bis(trifluoromethyl)-4,4’-diaminobiphenyl（TFDB）よりなるフッ素系ポリイミドならびにpyromellitic dianhydride（PMDA）とTFDBの組み合わせであるカプトン系―フッ素系ポリイミドを、モノマー供給濃度を高くすることでSiウエハ上に形成したマイクロスケールのトレンチ内部に充填することができた。","subitem_description_type":"Abstract"},{"subitem_description":"In the present work, the new deposition technique of polyimide using supercritical carbon dioxide was developed and sophisticated. The polyimides that were consisted of 2,2-bis(3,4-anhydrodicarboxyphenyl)-hexafluoropropane (6FDA) and 2,2’-bis(trifluoromethyl)-4,4’-diaminobiphenyl (TFDB) (fluorinated polyiomide), and pyromellitic dianhydride (PMDA) and TFDB (Kapton-fluorinated polyimide) could be fully deposited inside the microscale trenches of Si wafer at the high level of feed monomer concentration.","subitem_description_type":"Abstract"}]},"item_9_description_22":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"研究課題/領域番号:26420765, 研究期間(年度):2014-04-01 - 2017-03-31","subitem_description_type":"Other"},{"subitem_description":"出典：「超臨界二酸化炭素を利用した新規ポリイミド微細加工技術の基盤構築」研究成果報告書　課題番号26420765\n（KAKEN：科学研究費助成事業データベース（国立情報学研究所）） \n（https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-26420765/26420765seika/)を加工して作成","subitem_description_type":"Other"}]},"item_9_description_5":{"attribute_name":"提供者所属","attribute_value_mlt":[{"subitem_description":"金沢大学理工研究域機械工学系","subitem_description_type":"Other"}]},"item_9_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24517/00051980","subitem_identifier_reg_type":"JaLC"}]},"item_9_relation_28":{"attribute_name":"関連URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/search/?qm=90432682"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/search/?qm=90432682","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-26420765/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-26420765/","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-26420765/26420765seika/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-26420765/26420765seika/","subitem_relation_type_select":"URI"}}]},"item_9_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_ab4af688f83e57aa","subitem_version_type":"AM"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"春木, 将司"}],"nameIdentifiers":[{"nameIdentifier":"79278","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"90432682","nameIdentifierScheme":"e-Rad","nameIdentifierURI":"https://kaken.nii.ac.jp/ja/search/?qm=90432682"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-08-24"}],"displaytype":"detail","filename":"TE-PR-HARUKI-M-kaken 2017-5p.pdf","filesize":[{"value":"471.9 kB"}],"format":"application/pdf","licensetype":"license_11","mimetype":"application/pdf","url":{"label":"TE-PR-HARUKI-M-kaken 2017-5p.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/45643/files/TE-PR-HARUKI-M-kaken 2017-5p.pdf"},"version_id":"b7f1a379-7298-452c-bf14-0fcbc46dccd8"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"research report","resourceuri":"http://purl.org/coar/resource_type/c_18ws"}]},"item_title":"超臨界二酸化炭素を利用した新規ポリイミド微細加工技術の基盤構築","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"超臨界二酸化炭素を利用した新規ポリイミド微細加工技術の基盤構築"},{"subitem_title":"Development and sophistication of new microfabrication technique of polymide using supercritical carbon dioxide","subitem_title_language":"en"}]},"item_type_id":"9","owner":"18","path":["2817"],"pubdate":{"attribute_name":"公開日","attribute_value":"2018-08-24"},"publish_date":"2018-08-24","publish_status":"0","recid":"45643","relation_version_is_last":true,"title":["超臨界二酸化炭素を利用した新規ポリイミド微細加工技術の基盤構築"],"weko_creator_id":"18","weko_shared_id":-1},"updated":"2024-07-01T05:37:48.957718+00:00"}