{"created":"2023-07-27T06:52:34.491416+00:00","id":46585,"links":{},"metadata":{"_buckets":{"deposit":"6f78dcea-a154-4ca2-b2d1-071115de33e4"},"_deposit":{"created_by":18,"id":"46585","owners":[18],"pid":{"revision_id":0,"type":"depid","value":"46585"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00046585","sets":["2438:4190:4191"]},"author_link":["71368","80847","408","80852","71650","10422","80858","71652","71651","80864","2872","280"],"item_59_biblio_info_10":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueNumber":"K79","bibliographicPageEnd":"967","bibliographicPageStart":"969","bibliographicVolumeNumber":"2008 Spring","bibliographic_titles":[{"bibliographic_title":"精密工学会学術講演会講演論文集"},{"bibliographic_title":"2008 JSPE Spring Meeting","bibliographic_titleLang":"en"}]}]},"item_59_creator_5":{"attribute_name":"著者別表示","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Fujie, Norihisa"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Arikawa, Tatsuro"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Ueda, Takashi"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"Hosokawa, Akira"}],"nameIdentifiers":[{},{},{},{}]},{"creatorNames":[{"creatorName":"Furumoto, Tatsuaki"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"Tanaka, Ryutaro"}],"nameIdentifiers":[{},{}]}]},"item_59_description_23":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Laser cleaving is a prospective technique for separating a wafer or thin plate from brittle materials such as glasses and ceramics. However, there is a problem that laser irradiation often causes the thermal damage. Thermal damage to the surface of the glass causes the deterioration of cleaving accuracy. Consequently, it is important to minimize the thermal damage. In this paper, new cleaving technique is proposed, it uses CO2 laser and Er:YAG laser, and how inhibit the thermal damage is investigated.","subitem_description_type":"Abstract"},{"subitem_description":"近年，セラミックスや，ガラス等の脆性材料の切断法として，従来のダイヤモンドブレードダイシングに比べて切り代が小さく，清浄な加工が可能なレーザ熱応力割断が注目を集めている．しかしながら，レーザ照射に伴う温度上昇によって加工物に副き裂やはく離が生じるなどの熱的影響が問題となっている． そこで本研究では，CO2レーザを単独で照射した場合，CO2レーザとEr:YAGレーザの2つのレーザ同時に照射した場合について，ガラスを割断する方法を提案し，熱的影響抑制の効果について検討する．","subitem_description_type":"Abstract"}]},"item_59_description_24":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"出版者照会後に全文公開","subitem_description_type":"Other"}]},"item_59_description_7":{"attribute_name":"提供者所属","attribute_value_mlt":[{"subitem_description":"金沢大学理工研究域機械工学系","subitem_description_type":"Other"}]},"item_59_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24517/00052917","subitem_identifier_reg_type":"JaLC"}]},"item_59_publisher_19":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"精密工学会 = The Japan Society for Precision Engineering"}]},"item_59_relation_13":{"attribute_name":"NCID","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"BA90159927","subitem_relation_type_select":"NCID"}}]},"item_59_relation_14":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"10.11522/pscjspe.2008S.0.969.0","subitem_relation_type_select":"DOI"}}]},"item_59_relation_30":{"attribute_name":"関連URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"http://www.jspe.or.jp/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"http://www.jspe.or.jp/","subitem_relation_type_select":"URI"}}]},"item_59_rights_25":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"2008"},{"subitem_rights":"Copyright © The Japan Society for Precision Engineering"}]},"item_59_version_type_27":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"藤江, 典久"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"有川, 龍郎"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"上田, 隆司"}],"nameIdentifiers":[{},{},{}]},{"creatorNames":[{"creatorName":"細川, 晃"}],"nameIdentifiers":[{},{},{},{}]},{"creatorNames":[{"creatorName":"古本, 達明"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"田中, 隆太郎"}],"nameIdentifiers":[{},{},{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-05-09"}],"displaytype":"detail","filename":"TE-PR-UEDA-T-969.pdf","filesize":[{"value":"959.9 kB"}],"format":"application/pdf","licensetype":"license_11","mimetype":"application/pdf","url":{"label":"TE-PR-UEDA-T-969.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/46585/files/TE-PR-UEDA-T-969.pdf"},"version_id":"bda0c693-659a-4373-b6e4-7c4d961b2512"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"ガラスのレーザ割断に関する研究","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"ガラスのレーザ割断に関する研究"},{"subitem_title":"Study on the laser cleaving of glass materials","subitem_title_language":"en"}]},"item_type_id":"59","owner":"18","path":["4191"],"pubdate":{"attribute_name":"公開日","attribute_value":"2019-05-09"},"publish_date":"2019-05-09","publish_status":"0","recid":"46585","relation_version_is_last":true,"title":["ガラスのレーザ割断に関する研究"],"weko_creator_id":"18","weko_shared_id":-1},"updated":"2023-07-27T10:32:38.259184+00:00"}