{"created":"2023-07-27T06:53:08.502993+00:00","id":47458,"links":{},"metadata":{"_buckets":{"deposit":"f3a2334b-7ec8-4774-a237-c3bd3d0451ed"},"_deposit":{"created_by":18,"id":"47458","owners":[18],"pid":{"revision_id":0,"type":"depid","value":"47458"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00047458","sets":["2812:2813:2827"]},"author_link":["71379","84063"],"item_9_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2007-05","bibliographicIssueDateType":"Issued"},"bibliographicPageStart":"44p.","bibliographicVolumeNumber":"2005-2006","bibliographic_titles":[{"bibliographic_title":"平成18(2006)年度 科学研究費補助金 基盤研究(C) 研究成果報告書"},{"bibliographic_title":"2006 Fiscal Year Final Research Report","bibliographic_titleLang":"en"}]}]},"item_9_creator_33":{"attribute_name":"著者別表示","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{}],"nameIdentifiers":[{},{}]}]},"item_9_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"本研究では,Siナノ結晶を内包した微小球光共振器の新たな作製方法の確立を目的とする。さらに,その光学的性質について,自然放出光と微小共振器の相互作用に関する共振器量子電気力学的見地からの解析を行うことを目的とした。研究成果の概要は以下の通りである。\n試料のベースとなるa-SiOx薄膜ならびにa-SiO2薄膜は,それぞれ現有設備の高周波スパッタリング装置にて堆積したもの,あるいは熱酸化により形成したものを用いた。基板は耐熱性を重視してタングステンを用い,堆積膜厚は5・mとした。スパッタリングターゲットには,100mm・のSiO2ターゲット上にSiチップを載せたものを用いた。このSiチップの量によって堆積膜の組成を制御した。堆積したSiOx薄膜を島状に微細加工するために,電子ビーム描画装置によりパターニングを行った。パターンは直径0.5〜20・mの円形とし,リフトオフによってCrマスクパターンを試料上に残した。エッチングには,CF4ガスによる反応性イオンエッチングを用いた。ウェットエッチングによるCrマスク除去の後,走査型電子顕微鏡にて観察を行い,形成されたパターンを確認した。した。最後に,赤外線ゴールドイメージ炉を用い,微細加工により基板上に島状に残したSiOxに対し軟化点温度付近(1200〜1800℃)で加熱処理を行った。試料セルはモリブデン製を用い,熱処理雰囲気は酸化防止のためにアルゴンガスフロー中とした。熱処理条件は,1600℃において2分間が最適であることが分かり,この条件により,エッチング後の円柱形パターンの形状を半球形に変化させることに成功した。しかしながら,光学的な測定結果を得るまでには至らなかった。","subitem_description_type":"Abstract"},{"subitem_description":"This research work aimed to establish a novel fabrication method of microsphere optical cavity including silicon nanocrystallites. Then their optical properties are analyzed from a viewpoint of cavity quantum electrodynamic theory with respect to an interaction between spontaneously emitted light and microcavity.\nAmorphous (α-)SiOx and α-SiO_2 films as bases of samples are deposited using a radio-frequency sputtering method and a thermal oxidation method, respectively. Tungsten substrates are used in order to ensure heat resistance. The thickness of the films were 5μm. The sputtering target was SiO_2 disc with Si tips on it. The composition of the films deposited was controlled by varying the number of Si tips. An electron-beam drawing system was used for microfabrication of the films into island-like patterns. Circular patterns of chromium with 0.5-20μm in diameter were formed on the film by a lift-off process. The film was then etched by CF_4-plasma reactive ion etching. The columner patterns fabricated were checked by scanning electron microscope. Those columner islands of SiOx fims were heated up to around softening point, that is, 1200-1600℃. The samples inserted in a Mo cell were in an atmosphere of Ar gas flow in order to avoid oxidation. The optimal condition of heating was 2 minutes at 1600℃. Under this condition, the columner islands were successfully deformed into hemispherical shapes. However, analysis of their optical properties was difficult at that point in time.","subitem_description_type":"Abstract"}]},"item_9_description_22":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"研究課題/領域番号:17560306, 研究期間(年度):2005-2006","subitem_description_type":"Other"},{"subitem_description":"出典：「シリコンナノ結晶分散薄膜を用いた微小球光共振器の作製と光学特性解析」研究成果報告書　課題番号17560306\n  (KAKEN：科学研究費助成事業データベース（国立情報学研究所）)\n　　　本文データは著者版報告書より作成","subitem_description_type":"Other"}]},"item_9_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24517/00053785","subitem_identifier_reg_type":"JaLC"}]},"item_9_publisher_17":{"attribute_name":"公開者","attribute_value_mlt":[{"subitem_publisher":"金沢大学理工研究域電子情報通信学系"}]},"item_9_relation_28":{"attribute_name":"関連URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/search/?qm=50221784"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/search/?qm=50221784","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-17560306/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-17560306/","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-17560306/175603062006kenkyu_seika_hokoku_gaiyo/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-17560306/175603062006kenkyu_seika_hokoku_gaiyo/","subitem_relation_type_select":"URI"}}]},"item_9_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_ab4af688f83e57aa","subitem_version_type":"AM"}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-03-15"}],"displaytype":"detail","filename":"TE-PR-INOKUMA-T-kaken 2007-44p.pdf","filesize":[{"value":"9.7 MB"}],"format":"application/pdf","licensetype":"license_11","mimetype":"application/pdf","url":{"label":"TE-PR-INOKUMA-T-kaken 2007-44p.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/47458/files/TE-PR-INOKUMA-T-kaken 2007-44p.pdf"},"version_id":"513dd4ba-6fa5-44ff-9f16-b30cf16755df"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"research report","resourceuri":"http://purl.org/coar/resource_type/c_18ws"}]},"item_title":"シリコンナノ結晶分散薄膜を用いた微小球光共振器の作製と光学特性解析","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"シリコンナノ結晶分散薄膜を用いた微小球光共振器の作製と光学特性解析"},{"subitem_title":"Fabrication and analysis of optical properties in spherical microcavity using nc-Si dispersed films","subitem_title_language":"en"}]},"item_type_id":"9","owner":"18","path":["2827"],"pubdate":{"attribute_name":"公開日","attribute_value":"2019-03-15"},"publish_date":"2019-03-15","publish_status":"0","recid":"47458","relation_version_is_last":true,"title":["シリコンナノ結晶分散薄膜を用いた微小球光共振器の作製と光学特性解析"],"weko_creator_id":"18","weko_shared_id":-1},"updated":"2023-07-27T14:33:50.896496+00:00"}