{"created":"2023-07-27T06:55:15.575656+00:00","id":51025,"links":{},"metadata":{"_buckets":{"deposit":"3e0e02b4-5d3c-4c50-a707-1083c7fed126"},"_deposit":{"created_by":18,"id":"51025","owners":[18],"pid":{"revision_id":0,"type":"depid","value":"51025"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00051025","sets":["2812:2813:2841"]},"author_link":["92392","92393"],"item_9_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1993-05","bibliographicIssueDateType":"Issued"},"bibliographicPageStart":"66p.","bibliographicVolumeNumber":"1991-1992","bibliographic_titles":[{"bibliographic_title":"平成4(1992)年度 科学研究費補助金 一般研究(C) 研究成果報告書"},{"bibliographic_title":"1992 Fiscal Year Final Research Report","bibliographic_titleLang":"en"}]}]},"item_9_creator_33":{"attribute_name":"著者別表示","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{}],"nameIdentifiers":[{},{}]}]},"item_9_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"The synthesis of diamond films from ethyl alcohol and hydrogen was performed objecting to synthesize them at temperature as low as possible. We used a capacitively coupled rf (13.56 MHz) plasma CVD apparatus and an external heater. The films were prepared at various conditions varying gas pressure, gas concentration, heating temperature and electorode distance. The films were characterized by Raman scattering, SEM and ESR, and the following results were obtained.\n1. When a reaction tube with a diameter of 50 mm is used, diamond films do not grow if the tube is not heated. This is due to that the temperature produced by only rf discharge is not sufficient for diamond growth.\n2. When the temperature is set at 550ﾟC by an electric furnace, diamonds grow at gas pressures of 1 - 3 Torr and ethyl alcohol concentrations of 1 - 3 %.\n3. Under above pressure and concentration, diamonds grow at temperatures of 350 - 800ﾟC.\n4. The films grown at 350ﾟC contain nondiamond components in addition to diamonds. They are composed of balllike particles.\n5. When a reaction tube with a diameter of 35 mm and an infrared heater are used, the film of high quality is obtained by optimizing the electrode distance.\n6. In above case, the film without nondiamond components is obtained even without the heating. The temperature in this case is estimated to be 370ﾟC.","subitem_description_type":"Abstract"},{"subitem_description":"出来る限り、低温で良質のダイヤモンド薄膜を合成することを目的として、容量結合型の高周波(13.56MHz)プラズマGVD装置に外部加熱炉を併用して、ダイヤモンド薄膜の合成を行った。エチルアルコールと水素を原料として、500Wの一定の放電電力のもとで、総ガス圧力、エチルアルコール濃度、加熱温度、電極間距離をパラメーターとして、種々の実験を試みた。合成膜はラマン分光,SEM,ESRによって評価した。その結果、以下の事が明らかになった。\n1、管径が50mmの反応管を使った場合、電気炉による加熱を利用しないとき、ダイヤモンドの析出は観測されない。これは放電による自己加熱だけでは、ダイヤモンド析出に必要な基板温度に達しないためである。\n2、外部加熱を利用して、基板温度を550ﾟCに設定したとき、総ガス圧力は1〜3Torr、エチルアルコール濃度は、1〜3%が、ダイヤモンド析出に最も良い条件である。\n3、上記の圧力、濃度下では、基板温度が350〜800ﾟCの範囲でダイヤモンドの析出が見られる。この内、550〜600ﾟCの範囲では、非ダイヤモンド成分の殆ど無い良質なダイヤモンド膜が得られる。\n4、350ﾟCでもダイヤモンドが析出するが、非ダイヤモンド成分の含有もある。この膜のSEM像によると、膜は多重双晶のボール状の粒子より構成されている。\n5、反応管径を35mmにし、赤外線加熱を使い、電極間距離を最適にした場合、非常に良質の膜が得られる。\n6、上記の反応管の場合、外部加熱無しでも、非ダイヤモンド成分の無い良質の膜が得られる。この場合の温度は370ﾟCと見積られる。","subitem_description_type":"Abstract"}]},"item_9_description_22":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"研究課題/領域番号:03650009, 研究期間(年度):1991-1992","subitem_description_type":"Other"},{"subitem_description":"出典：「ダイヤモンド薄膜の低温気相合成」研究成果報告書　課題番号03650009\n(KAKEN：科学研究費助成事業データベース（国立情報学研究所）)\n　　　本文データは著者版報告書より作成","subitem_description_type":"Other"}]},"item_9_description_5":{"attribute_name":"提供者所属","attribute_value_mlt":[{"subitem_description":"金沢大学工学部","subitem_description_type":"Other"}]},"item_9_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24517/00057328","subitem_identifier_reg_type":"JaLC"}]},"item_9_relation_28":{"attribute_name":"関連URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/search/?qm=70019743"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/search/?qm=70019743","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03650009/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03650009/","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-03650009/036500091992kenkyu_seika_hokoku_gaiyo/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/report/KAKENHI-PROJECT-03650009/036500091992kenkyu_seika_hokoku_gaiyo/","subitem_relation_type_select":"URI"}}]},"item_9_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_ab4af688f83e57aa","subitem_version_type":"AM"}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2021-05-14"}],"displaytype":"detail","filename":"TE-PR-WATANABE-I-kaken 1993-66p.pdf","filesize":[{"value":"2.1 MB"}],"format":"application/pdf","licensetype":"license_11","mimetype":"application/pdf","url":{"label":"TE-PR-WATANABE-I-kaken 1993-66p.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/51025/files/TE-PR-WATANABE-I-kaken 1993-66p.pdf"},"version_id":"25937f0f-5e83-4efc-af74-5698546e609d"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"research report","resourceuri":"http://purl.org/coar/resource_type/c_18ws"}]},"item_title":"ダイヤモンド薄膜の低温気相合成","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"ダイヤモンド薄膜の低温気相合成"},{"subitem_title":"Low Temperature Growth of Diamond Films from Vapor Phase","subitem_title_language":"en"}]},"item_type_id":"9","owner":"18","path":["2841"],"pubdate":{"attribute_name":"公開日","attribute_value":"2021-05-14"},"publish_date":"2021-05-14","publish_status":"0","recid":"51025","relation_version_is_last":true,"title":["ダイヤモンド薄膜の低温気相合成"],"weko_creator_id":"18","weko_shared_id":-1},"updated":"2023-07-27T14:52:53.588218+00:00"}