{"created":"2023-07-27T07:00:47.488253+00:00","id":60850,"links":{},"metadata":{"_buckets":{"deposit":"a347e5c5-6ecd-4c2d-b00e-8fbd0dda698c"},"_deposit":{"created_by":18,"id":"60850","owners":[18],"pid":{"revision_id":0,"type":"depid","value":"60850"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00060850","sets":["1829:2275:2276"]},"author_link":["107112","107109","107060","107027","107108","107059","107028","107081","107107"],"item_4_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2017-03-21","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"3","bibliographicPageStart":"033506","bibliographicVolumeNumber":"88","bibliographic_titles":[{"bibliographic_title":"Review of Scientific Instruments"}]}]},"item_4_creator_33":{"attribute_name":"著者別表示","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"長井, 圭治"}],"nameIdentifiers":[{},{}]}]},"item_4_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"With the advent of high volume manufacturing capabilities by extreme ultraviolet lithography, constant improvements in light source design and cost-efficiency are required. Currently, light intensity and conversion efficiency (CE) measurments are obtained by charged couple devices, faraday cups etc, but also phoshpor imaging plates (IPs) (BaFBr:Eu). IPs are sensitive to light and high-energy species, which is ideal for studying extreme ultraviolet (EUV) light from laser produced plasmas (LPPs). In this work, we used IPs to observe a large angular distribution (10°-90°). We ablated a tin target by high-energy lasers (1064 nm Nd:YAG, 1010 and 1011 W/cm2) to generate the EUV light. The europium ions in the IP were trapped in a higher energy state from exposure to EUV light and high-energy species. The light intensity was angular dependent; therefore excitation of the IP depends on the angle, and so highly informative about the LPP. We obtained high-space resolution (345 μm, 0.2°) angular distribution and grazing spectrometer (5-20 nm grate) data simultaneously at different target to IP distances (103 mm and 200 mm). Two laser systems and IP types (BAS-TR and BAS-SR) were also compared. The cosine fitting values from the IP data were used to calculate the CE to be 1.6% (SD ± 0.2) at 13.5 nm 2% bandwidth. Finally, a practical assessment of IPs and a damage issue are disclosed. © 2017 Author(s).","subitem_description_type":"Abstract"}]},"item_4_description_22":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"Embargo Period 12 months","subitem_description_type":"Other"}]},"item_4_description_5":{"attribute_name":"提供者所属","attribute_value_mlt":[{"subitem_description":"金沢大学先端科学・社会共創推進機構","subitem_description_type":"Other"}]},"item_4_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24517/00067095","subitem_identifier_reg_type":"JaLC"}]},"item_4_publisher_17":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"American Institute of Physics Inc."}]},"item_4_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"10.1063/1.4978526","subitem_relation_type_select":"DOI"}}]},"item_4_relation_28":{"attribute_name":"関連URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"https://aip.scitation.org/doi/10.1063/1.4978526"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://aip.scitation.org/doi/10.1063/1.4978526","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"https://aip.scitation.org/journal/rsi"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://aip.scitation.org/journal/rsi","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"https://aip.scitation.org/journal/rsi"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://aip.scitation.org/journal/rsi","subitem_relation_type_select":"URI"}}]},"item_4_rights_23":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright © 2017 Author(s)."}]},"item_4_source_id_11":{"attribute_name":"NCID","attribute_value_mlt":[{"subitem_source_identifier":"AA12442307","subitem_source_identifier_type":"NCID"}]},"item_4_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0034-6748","subitem_source_identifier_type":"ISSN"},{"subitem_source_identifier":"1089-7623","subitem_source_identifier_type":"ISSN"}]},"item_4_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Musgrave, Christopher S. A."}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Murakami, Takehiro"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Ugomori, Teruyuki"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Yoshida, Kensuke"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Fujioka, Shinsuke"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Nishimura, Hiroaki"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Atarashi, Hironori"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Iyoda, Tomokazu"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Nagai, Keiji"}],"nameIdentifiers":[{},{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2022-09-12"}],"displaytype":"detail","filename":"FR-PR-NAGAI-K-88-033506.pdf","filesize":[{"value":"6.4 MB"}],"format":"application/pdf","licensetype":"license_11","mimetype":"application/pdf","url":{"label":"FR-PR-NAGAI-K-88-033506.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/60850/files/FR-PR-NAGAI-K-88-033506.pdf"},"version_id":"6cd1371f-44c7-4431-9a22-c26360fb17f5"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas"}]},"item_type_id":"4","owner":"18","path":["2276"],"pubdate":{"attribute_name":"公開日","attribute_value":"2022-09-12"},"publish_date":"2022-09-12","publish_status":"0","recid":"60850","relation_version_is_last":true,"title":["High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas"],"weko_creator_id":"18","weko_shared_id":-1},"updated":"2023-07-27T12:29:30.945910+00:00"}