{"created":"2023-07-27T07:01:15.481322+00:00","id":61479,"links":{},"metadata":{"_buckets":{"deposit":"29060052-47a3-4fea-8c3f-64fbdec8497e"},"_deposit":{"created_by":18,"id":"61479","owners":[18],"pid":{"revision_id":0,"type":"depid","value":"61479"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00061479","sets":["2812:2813:2845"]},"author_link":["10581","14940"],"item_9_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1990-03-19","bibliographicIssueDateType":"Issued"},"bibliographicPageStart":"2p.","bibliographicVolumeNumber":"1987 – 1988","bibliographic_titles":[{"bibliographic_title":"昭和63(1988)年度 科学研究費補助金 一般研究(C) 研究成果報告書概要"},{"bibliographic_title":"1988 Fiscal Year Final Research Report Summary","bibliographic_titleLang":"en"}]}]},"item_9_creator_33":{"attribute_name":"著者別表示","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{}],"nameIdentifiers":[{},{}]}]},"item_9_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"超LSI製造工程などにおける製品不良率をできるだけ低く抑えるために、高度な清浄空間を作り出すことが重要であると同時に、空気中の微粒子の物体表面への沈着をできるだけ少なくする工夫が必要である。そのためにはまず、粒子の表面への沈着機構を明らかにし沈着量を推定する方法が確立されていなければならない。本研究では、現在量産体制に りつつある1MビットLSIの制御対象粒径である0.1μm前後の超微小粒子に着目し、0.02〜0.8μmの範囲の単分散エアロゾル粒子を発生させ、粒子帯電や壁の材質の違いの粒子沈着量に及ぼす影響を実験的に検討した。昭和62年度では、まず銅管、ガラス管、アクリル管など6種類の材質の異なる円管に単分散粒子を流し、粒径、速度、粒子帯電量を変化させて壁への粒子沈着速度を粒子透過率の実測値より求めた。その結果、銅管(導体)では粒子の帯電の有無に拘らずブラウン拡散のみで沈着するが、アクリルなどの誘電体管では粒子が帯電すると沈着量が著しく増加し、帯電粒子の沈着速度はクーロンカパラメータでまとめられることがわかった。次いで昭和63年度では、半導体であるシリコンウエハ上への粒子沈着量と空気清浄度(エアロゾル濃度)との関係を明らかにするために、垂直層流型クリーンブース内にウエハ面を水平または鉛直に設置し、蛍光物質であるロダミンB単分散粒子をウエハ中心軸上方のノズルから周囲の清浄気流と共に流すという従来にない方法でウエハ面上を流し、蛍光分光光度計により沈着量を測定した。結果はAhn-Liuが提出した拡散沈着速度推定式に、重力およびクーロンカ沈着速度を加算した式に極めてよく一致した。これにより、従来、0.5μm以上の粒子のみに対してしかなかった沈着量データが0.03μmまでの超微小粒子に対して得られたことになり、4Mビット時代での粒子沈着量の推定、ひいては製品歩留りの予測に役立つものと思われる。","subitem_description_type":"Abstract"},{"subitem_description":"Deposition of submicron particles in the manufacturing process of semiconductors is one of the main causes of reducing production yield. In order to suppress particle deposition onto the surface of various materials, the deposition mechanisms of submicron particles have to be well understood. In the present work, first, by using circular tubes made of various materials, deposition of particles in various charging states was experimentally investigated. The tube materials studied were copper, glass, polymethylmetacrylate(PMMA), polyvinylchloride(PVC), pllycarbonate(PC), and polyethylene (PE). As a result it was found that 1) uncharged particle deposits by Brownian diffusion in all the tubes studies; 2) charged particle deposits in PMMA, PVC, PC and PE tubes by coulombic force, and that the dimensionless deposition velocity is equal to the coulombic force parameter derived for charged particle and charged infinite flat surface. Further, from the measurement of time dependency of particle penetration, decay of triboelectric charged on PVC and PC tubes was found to obey the law of hyperbolic decay. Secondly, experimental technique to measure deposition velocity onto wafer for particles with a diameter smaller than 0.3 m was developed by means of fluorometry. Employing the proposed technique, the deposition velocity onto the wafer was measured for charge equilibrium particles and singly charged particles with diameter between 0.03 and 0.8 m at airflow velocity of 0.02-0.5m/s. The measured deposition velocity was compared with that predicted by Liu and Ahn's equation. As a result, it was found that the Lie and Ahn's equation gives a good prediction for particles in the size range between 0.03 and 0.8 m, and , when both the wafer and the particles are charged, the deposition velocity is well estimated by adding the coulombic drift velocity to their equation. Further, through the measurement of the local deposition velocity on the wafer placed normal to the airflow, the deposition hot spots were found to appear on the edge of the wafer and/or at the center of the wafer, depending on the blockage of the wafer to the airflow.","subitem_description_type":"Abstract"}]},"item_9_description_22":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"研究課題/領域番号:62550692, 研究期間(年度):1987 – 1988","subitem_description_type":"Other"},{"subitem_description":"出典：研究課題「超微小粒子の壁面への沈着」課題番号62550692\n（KAKEN：科学研究費助成事業データベース（国立情報学研究所）） \n（https://kaken.nii.ac.jp/ja/report/KAKENHI-PROJECT-62550692/625506921988kenkyu_seika_hokoku_gaiyo/）を加工して作成","subitem_description_type":"Other"}]},"item_9_description_5":{"attribute_name":"提供者所属","attribute_value_mlt":[{"subitem_description":"金沢大学工学部","subitem_description_type":"Other"}]},"item_9_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24517/00067722","subitem_identifier_reg_type":"JaLC"}]},"item_9_relation_28":{"attribute_name":"関連URI","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/ja/search/?kw=00019770"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/ja/search/?kw=00019770","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/ja/grant/KAKENHI-PROJECT-62550692/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/ja/grant/KAKENHI-PROJECT-62550692/","subitem_relation_type_select":"URI"}},{"subitem_relation_name":[{"subitem_relation_name_text":"https://kaken.nii.ac.jp/ja/report/KAKENHI-PROJECT-62550692/625506921988kenkyu_seika_hokoku_gaiyo/"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://kaken.nii.ac.jp/ja/report/KAKENHI-PROJECT-62550692/625506921988kenkyu_seika_hokoku_gaiyo/","subitem_relation_type_select":"URI"}}]},"item_9_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_ab4af688f83e57aa","subitem_version_type":"AM"}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2022-10-31"}],"displaytype":"detail","filename":"TE-PR-KANAOKA-C-kaken 1990-2p.pdf","filesize":[{"value":"86.4 kB"}],"format":"application/pdf","licensetype":"license_11","mimetype":"application/pdf","url":{"label":"TE-PR-KANAOKA-C-kaken 1990-2p.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/61479/files/TE-PR-KANAOKA-C-kaken 1990-2p.pdf"},"version_id":"c9081e97-3ff2-4c21-ba2a-967cf45fd80a"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"research report","resourceuri":"http://purl.org/coar/resource_type/c_18ws"}]},"item_title":"超微小粒子の壁面への沈着","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"超微小粒子の壁面への沈着"},{"subitem_title":"Deposition of Ultra Fine Aerosol Particles on Solid Surfaces","subitem_title_language":"en"}]},"item_type_id":"9","owner":"18","path":["2845"],"pubdate":{"attribute_name":"公開日","attribute_value":"2022-10-31"},"publish_date":"2022-10-31","publish_status":"0","recid":"61479","relation_version_is_last":true,"title":["超微小粒子の壁面への沈着"],"weko_creator_id":"18","weko_shared_id":-1},"updated":"2023-07-27T11:53:01.921813+00:00"}