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Controlling the number of excited atoms flowing into the reaction chamber using pulse-modulated induction thermal plasmas at atmospheric pressure
http://hdl.handle.net/2297/6753
http://hdl.handle.net/2297/67537b423229-3047-44e7-8cfc-0922801eb65e
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
TE-PR-TANAKA-Y-281.pdf (1.4 MB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2017-10-03 | |||||
| タイトル | ||||||
| タイトル | Controlling the number of excited atoms flowing into the reaction chamber using pulse-modulated induction thermal plasmas at atmospheric pressure | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
Tanaka, Yasunori
× Tanaka, Yasunori× Uesugi, Yoshihiko× Sakuta, T. |
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| 書誌情報 |
Plasma Sources Science and Technology 巻 16, 号 2, p. 281-289, 発行日 2007-05-01 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0963-0252 | |||||
| DOI | ||||||
| 関連タイプ | isIdenticalTo | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1088/0963-0252/16/2/010 | |||||
| 出版者 | ||||||
| 出版者 | American Institute of Physics | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Controlling the number of excited atoms into a reaction chamber was investigated in Ar pulse-modulated induction thermal plasma (PMITP) with molecular gases at atmospheric pressure. Such control is important in promoting the modification of substrate surfaces in thermal plasma processing. The coil current required for sustaining a PMITP was modulated by setting the firing angle of the metal-oxide-semiconductor field-effect transistor in the inverter power supply used as a high-frequency power source. The radiation intensities of the excited atomic lines were measured using the optical emission spectroscopy technique to estimate the number of excited atoms flowing into the reaction chamber. In particular, we found an increase in the number of excited Ar and H atoms flowing into the reaction chamber in Ar or Ar-H2 PMITPs as a result of the pulse modulation of the coil current. © 2007 IOP Publishing Ltd. | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| シリーズ | ||||||
| 関連名称 | 010 | |||||
