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The influence of the hot wire temperature on the crystallization of μc-Si:H films prepared by hot wire-assisted-ECR-CVD
http://hdl.handle.net/2297/6745
http://hdl.handle.net/2297/674555659f9e-78ab-479f-b634-229b7f054d11
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
TE-PR-KUMEDA-M-207.pdf (252.6 kB)
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| Item type | 会議発表論文 / Conference Paper(1) | |||||
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| 公開日 | 2017-10-03 | |||||
| タイトル | ||||||
| タイトル | The influence of the hot wire temperature on the crystallization of μc-Si:H films prepared by hot wire-assisted-ECR-CVD | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
| 資源タイプ | conference paper | |||||
| 著者 |
Li, Ying
× Li, Ying× Zhong L., Zhi× Hua Chen, Guang× Kumeda, Minoru |
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| 提供者所属 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | 金沢大学大学院自然科学研究科電子物性デバイス | |||||
| 提供者所属 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | 金沢大学工学部 | |||||
| 書誌情報 |
Materials Research Society Symposium Proceedings 巻 910, p. 207-212, 発行日 2007-01-01 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0272-9172 | |||||
| 出版者 | ||||||
| 出版者 | Materials Research Society | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We have constructed a hot-wire-assisted ECR-CVD system to prepare a-Si:H and μc-Si:H films. The effect of hot wire (HW) temperature on crystallization of a-Si:H films is studied in the films prepared by this system. At low HW temperature, about 20 at.% hydrogen is included in the film. With increasing the HW temperature, the contents of the total hydrogen, SiH2 and SiH decrease, and the microcrystalline phase appears. It is found from the area of the TO peak of the Raman scattering spectra that the volume fraction of the crystalline phase increases with increasing the HW temperature. The crystalline peak has a tendency to shift toward the higher wavenumber with increasing the HW temperature, suggesting that the grain size increases with increasing the HW temperature. © 2006 Materials Research Society. | |||||
| 著者版フラグ | ||||||
| 出版タイプ | AM | |||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
