@article{oai:kanazawa-u.repo.nii.ac.jp:00007652,
 author = {Tanaka, Yasunori and Yokomizu, Yasunobu and Ishikawa, Motohiro and Matsumura, Toshiro},
 issue = {5},
 journal = {IEEE Transaction on Plasma Science},
 month = {Oct},
 note = {AA0066803X, Numerical computation was performed to derive particle compositions of high-pressure SF6 plasmas in which the electron temperature Te is greater than the gas temperature T g. The effective excitation temperature Tex for each of particles was proposed to express the distribution of particles in excited states. Furthermore, the relation equations for chemical equilibrium in a two-temperature plasma were developed on the basis of the second law of thermodynamics. At fixed Tg in the range of 6000-9000 K, the increasing Te from 9000-20 000 K encourages the dissociation and ionization of particles, causing the composition of SF6 plasma at 0.1 MPa to differ markedly from the composition under the condition of thermal equilibrium},
 pages = {991--995},
 title = {Particle composition of high-pressure SF/sub6/ plasma with electron temperature greater than gas temperature},
 volume = {25},
 year = {1997}
}