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Generation of high-power arbitrary-wave-form modulated inductively coupled plasmas for materials processing
http://hdl.handle.net/2297/6752
http://hdl.handle.net/2297/67526db891ad-a0f1-4819-94cc-471a6fdc41f2
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
TE-PR-TANAKA-Y-071502.pdf (158.0 kB)
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| Item type | 一般雑誌記事 / Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-10-03 | |||||
| タイトル | ||||||
| タイトル | Generation of high-power arbitrary-wave-form modulated inductively coupled plasmas for materials processing | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | article | |||||
| 著者 |
Tanaka, Yasunori
× Tanaka, Yasunori× Morishita, Yu× Fushie, Shunsuke× Okunaga, Kyota× Uesugi, Yoshihiko |
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| 提供者所属 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | 金沢大学大学院自然科学研究科電子科学 | |||||
| 提供者所属 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | 金沢大学工学部 | |||||
| 書誌情報 |
Applied Physics Letters 巻 90, 号 7, 発行日 2007-01-01 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 003-6951 | |||||
| DOI | ||||||
| 関連タイプ | isIdenticalTo | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1063/1.2696885 | |||||
| 出版者 | ||||||
| 出版者 | American Institute of Physics | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | An arbitrary-wave-form modulated induction thermal plasma (AMITP) system was developed using a high-power semiconductor high-frequency power supply. The modulated high-power plasma is a breakthrough technique for controlling the temperature and the radical density in high-density plasmas. The arbitrary-wave-form modulation of the coil current enables more detailed control of the temperature of the high-density plasmas than the pulse-amplitude modulation that has already been developed. The Ar AMITP with intentionally modulated coil current could be generated at a power of 10-15 kW. Results showed that the Ar excitation temperature between the specified excitation levels was changed intentionally according to the modulation control signal. © 2007 American Institute of Physics. | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| シリーズ | ||||||
| 関連名称 | 71502 | |||||
