{"created":"2023-07-27T06:24:42.901980+00:00","id":7734,"links":{},"metadata":{"_buckets":{"deposit":"3b6f2f60-02fc-4fd5-87f0-4e453c9d0df9"},"_deposit":{"created_by":3,"id":"7734","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"7734"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00007734","sets":["934:935:936"]},"author_link":["10464","50","10463","10465","67"],"item_6_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2007-01-01","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"7","bibliographicVolumeNumber":"90","bibliographic_titles":[{"bibliographic_title":"Applied Physics Letters"}]}]},"item_6_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"An arbitrary-wave-form modulated induction thermal plasma (AMITP) system was developed using a high-power semiconductor high-frequency power supply. The modulated high-power plasma is a breakthrough technique for controlling the temperature and the radical density in high-density plasmas. The arbitrary-wave-form modulation of the coil current enables more detailed control of the temperature of the high-density plasmas than the pulse-amplitude modulation that has already been developed. The Ar AMITP with intentionally modulated coil current could be generated at a power of 10-15 kW. Results showed that the Ar excitation temperature between the specified excitation levels was changed intentionally according to the modulation control signal. © 2007 American Institute of Physics.","subitem_description_type":"Abstract"}]},"item_6_description_5":{"attribute_name":"提供者所属","attribute_value_mlt":[{"subitem_description":"金沢大学大学院自然科学研究科電子科学","subitem_description_type":"Other"},{"subitem_description":"金沢大学工学部","subitem_description_type":"Other"}]},"item_6_publisher_17":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"American Institute of Physics"}]},"item_6_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"10.1063/1.2696885","subitem_relation_type_select":"DOI"}}]},"item_6_relation_27":{"attribute_name":"シリーズ","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"71502"}]}]},"item_6_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"003-6951","subitem_source_identifier_type":"ISSN"}]},"item_6_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Tanaka, Yasunori"}],"nameIdentifiers":[{"nameIdentifier":"67","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"90303263","nameIdentifierScheme":"e-Rad","nameIdentifierURI":"https://kaken.nii.ac.jp/ja/search/?qm=90303263"},{"nameIdentifier":"90303263","nameIdentifierScheme":"金沢大学研究者情報","nameIdentifierURI":"http://ridb.kanazawa-u.ac.jp/public/detail.php?kaken=90303263"},{"nameIdentifier":"90303263","nameIdentifierScheme":"研究者番号","nameIdentifierURI":"https://nrid.nii.ac.jp/nrid/1000090303263"}]},{"creatorNames":[{"creatorName":"Morishita, Yu"}],"nameIdentifiers":[{"nameIdentifier":"10463","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Fushie, Shunsuke"}],"nameIdentifiers":[{"nameIdentifier":"10464","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Okunaga, Kyota"}],"nameIdentifiers":[{"nameIdentifier":"10465","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Uesugi, Yoshihiko"}],"nameIdentifiers":[{"nameIdentifier":"50","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"90213339","nameIdentifierScheme":"e-Rad","nameIdentifierURI":"https://kaken.nii.ac.jp/ja/search/?qm=90213339"},{"nameIdentifier":"90213339","nameIdentifierScheme":"金沢大学研究者情報","nameIdentifierURI":"http://ridb.kanazawa-u.ac.jp/public/detail.php?kaken=90213339"},{"nameIdentifier":"90213339","nameIdentifierScheme":"研究者番号","nameIdentifierURI":"https://nrid.nii.ac.jp/nrid/1000090213339"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-10-03"}],"displaytype":"detail","filename":"TE-PR-TANAKA-Y-071502.pdf","filesize":[{"value":"158.0 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"TE-PR-TANAKA-Y-071502.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/7734/files/TE-PR-TANAKA-Y-071502.pdf"},"version_id":"b2ec3ff5-dbbe-4358-91bf-0c0b84eb794c"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Generation of high-power arbitrary-wave-form modulated inductively coupled plasmas for materials processing","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Generation of high-power arbitrary-wave-form modulated inductively coupled plasmas for materials processing"}]},"item_type_id":"6","owner":"3","path":["936"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-10-03"},"publish_date":"2017-10-03","publish_status":"0","recid":"7734","relation_version_is_last":true,"title":["Generation of high-power arbitrary-wave-form modulated inductively coupled plasmas for materials processing"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2024-06-20T06:24:31.378583+00:00"}