{"created":"2023-07-27T06:24:43.872015+00:00","id":7757,"links":{},"metadata":{"_buckets":{"deposit":"e5e85ec4-002f-46ae-9ee2-1b4ee355a970"},"_deposit":{"created_by":3,"id":"7757","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"7757"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00007757","sets":["2438:4190:4191"]},"author_link":["10519","10518","132","10520","9767","18597","10521"],"item_4_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1998-05-01","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"644","bibliographicPageStart":"639","bibliographicVolumeNumber":"127-129","bibliographic_titles":[{"bibliographic_title":"Applied Surface Science"}]}]},"item_4_creator_33":{"attribute_name":"著者別表示","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"森本, 章治"}],"nameIdentifiers":[{},{},{},{}]},{"creatorNames":[{"creatorName":"清水, 立生"}],"nameIdentifiers":[{},{}]}]},"item_4_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Volume and size distribution of droplets in oxide films were investigated for a variety of laser fluences, wavelengths and target temperatures. Effects of both the ambient gas pressure and the substrate temperature on the droplet formation was investigated. It was found that the increase in the ratio of the droplet volume to the film volume Vd/Vf caused by increasing the maximum etching depth of target per laser shot de (Vd/Vfde3, as previously reported) due to changes in the deposition conditions other than the target temperature is mainly attributed to an increase in the formation of large droplets. It was also found that the correlation Vd/Vfde3 is also valid for elevated target-temperatures, and the increase in the target temperature enhances the formation of small droplets compared with large ones. The effect of cooling of droplets after the ejection from the target due to the ambient pressure and/or the substrate temperature is discussed.","subitem_description_type":"Abstract"}]},"item_4_description_5":{"attribute_name":"提供者所属","attribute_value_mlt":[{"subitem_description":"金沢大学設計製造技術研究所 / 金沢大学理工研究域電子情報学系 / 金沢大学工学部","subitem_description_type":"Other"}]},"item_4_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24517/00007744","subitem_identifier_reg_type":"JaLC"}]},"item_4_publisher_17":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"Elsevier"}]},"item_4_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isVersionOf","subitem_relation_type_id":{"subitem_relation_type_id_text":"https://doi.org/10.1016/s0169-4332(97)00718-6","subitem_relation_type_select":"DOI"}}]},"item_4_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0169-4332","subitem_source_identifier_type":"ISSN"}]},"item_4_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_ab4af688f83e57aa","subitem_version_type":"AM"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Yonezawa, Yasuto"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Minamikawa, Toshiharu"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Matsuda, Kazuko"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Takezawa, Katsuhito"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Morimoto, Akiharu"}],"nameIdentifiers":[{},{},{},{}]},{"creatorNames":[{"creatorName":"Shimizu, Tatsuo"}],"nameIdentifiers":[{},{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-10-03"}],"displaytype":"detail","filename":"TE-PR-MORIMOTO-S-705.pdf","filesize":[{"value":"573.5 kB"}],"format":"application/pdf","licensetype":"license_11","mimetype":"application/pdf","url":{"label":"TE-PR-MORIMOTO-S-705.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/7757/files/TE-PR-MORIMOTO-S-705.pdf"},"version_id":"9f3dbe07-294f-481a-a87f-834d0e978dba"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Size distribution of droplets in film prepared by pulsed laser ablation","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Size distribution of droplets in film prepared by pulsed laser ablation"}]},"item_type_id":"4","owner":"3","path":["4191"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-10-03"},"publish_date":"2017-10-03","publish_status":"0","recid":"7757","relation_version_is_last":true,"title":["Size distribution of droplets in film prepared by pulsed laser ablation"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-07-27T10:10:18.747347+00:00"}