@article{oai:kanazawa-u.repo.nii.ac.jp:00007809, author = {Paul, K.C. and Tanaka, Yasunori and Sakuta, T.}, journal = {IEEE International Conference on Plasma Science (ICOPS)}, month = {Jun}, note = {Atmospheric pressure plasma in pre-mixed Ar/H2 flow was generated by pulse-modulation method. The coil length of the inductively-coupled plasma (ICP) torch was extremely large. The source side power was 30 kW before pulsation, and thus the plasma power had around 25.6 kW considering 85% matching efficiency., 金沢大学工学部}, pages = {128--128}, title = {Diagnosis of large volume pulse modulated Ar-H2 plasmas}, year = {1999} }