{"created":"2023-07-27T06:25:04.882556+00:00","id":8233,"links":{},"metadata":{"_buckets":{"deposit":"e348165e-499b-4a7c-bc65-b5e35fbec26b"},"_deposit":{"created_by":3,"id":"8233","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"8233"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00008233","sets":["934:935:936"]},"author_link":["67"],"item_4_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2009-12-30","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"3","bibliographicPageEnd":"942","bibliographicPageStart":"936","bibliographicVolumeNumber":"518","bibliographic_titles":[{"bibliographic_title":"Thin Solid Films"}]}]},"item_4_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"A two-dimensional thermally and chemically non-equilibrium model was developed for Ar-N2-H2 inductively coupled plasmas (ICP) at reduced pressure. The Ar-N2-H2 or Ar-NH3 plasmas at reduced pressure has been widely used for nitriding processing of materials. Totally 164 reactions including 82 forward reactions and their backward reactions were taken into account. Spatial particle composition distribution in the plasma torch as well as in the reaction chamber was derived by solving simultaneously the mass conservation equation of each particle, considering diffusion, convection and production terms. © 2009 Elsevier B.V. All rights reserved.","subitem_description_type":"Abstract"}]},"item_4_description_5":{"attribute_name":"提供者所属","attribute_value_mlt":[{"subitem_description":"金沢大学理工研究域電子情報学系","subitem_description_type":"Other"}]},"item_4_publisher_17":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"Elsevier BV"}]},"item_4_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isVersionOf","subitem_relation_type_id":{"subitem_relation_type_id_text":"10.1016/j.tsf.2009.07.173","subitem_relation_type_select":"DOI"}}]},"item_4_relation_28":{"attribute_name":"関連URI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"http://www.elsevier.com/locate/issn/00406090","subitem_relation_type_select":"URI"}}]},"item_4_source_id_11":{"attribute_name":"NCID","attribute_value_mlt":[{"subitem_source_identifier":"AA00863068","subitem_source_identifier_type":"NCID"}]},"item_4_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0040-6090","subitem_source_identifier_type":"ISSN"}]},"item_4_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_ab4af688f83e57aa","subitem_version_type":"AM"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Tanaka, Yasunori"}],"nameIdentifiers":[{"nameIdentifier":"67","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"90303263","nameIdentifierScheme":"e-Rad","nameIdentifierURI":"https://kaken.nii.ac.jp/ja/search/?qm=90303263"},{"nameIdentifier":"90303263","nameIdentifierScheme":"金沢大学研究者情報","nameIdentifierURI":"http://ridb.kanazawa-u.ac.jp/public/detail.php?kaken=90303263"},{"nameIdentifier":"90303263","nameIdentifierScheme":"研究者番号","nameIdentifierURI":"https://nrid.nii.ac.jp/nrid/1000090303263"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-10-03"}],"displaytype":"detail","filename":"TE-PR-TANAKA-Y-936.pdf","filesize":[{"value":"664.9 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"TE-PR-TANAKA-Y-936.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/8233/files/TE-PR-TANAKA-Y-936.pdf"},"version_id":"c96c96a8-2920-4462-8906-f39e2bc7ca31"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Thermally and chemically non-equilibrium modelling of Ar-N2-H2 inductively coupled plasmas at reduced pressure","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Thermally and chemically non-equilibrium modelling of Ar-N2-H2 inductively coupled plasmas at reduced pressure"}]},"item_type_id":"4","owner":"3","path":["936"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-10-03"},"publish_date":"2017-10-03","publish_status":"0","recid":"8233","relation_version_is_last":true,"title":["Thermally and chemically non-equilibrium modelling of Ar-N2-H2 inductively coupled plasmas at reduced pressure"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2024-06-20T06:14:46.121866+00:00"}