{"created":"2023-07-27T06:25:35.261130+00:00","id":8947,"links":{},"metadata":{"_buckets":{"deposit":"89466539-0225-4c4f-8cac-3a9eb0734ce1"},"_deposit":{"created_by":3,"id":"8947","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"8947"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00008947","sets":["2438:4190:4191"]},"author_link":["71368","12725","71650","10422","269","71651","12726","280"],"item_4_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2011-01-01","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"7","bibliographicPageEnd":"426","bibliographicPageStart":"424","bibliographicVolumeNumber":"55","bibliographic_titles":[{"bibliographic_title":"砥粒加工学会誌 = Journal of the Japan Society of Grinding Engineers"}]}]},"item_4_creator_33":{"attribute_name":"著者別表示","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Ueda, Takashi"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"Furumoto, Tatsuaki"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"Hosokawa, Akira"}],"nameIdentifiers":[{},{},{},{}]}]},"item_4_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"CO2パルスレーザを用いて単結晶のサファイアウエハの熱応力割断を試みている．レーザ割断はサファイアウエハを分断する方法として有力な加工法である．パルスレーザを用いると，割断面には単結晶ウエハに特有な縞模様が形成される．曲線割断が可能であり，円弧状にサファイアウエハを割断できる．ウエハ上に加工された浅い溝の上をCO2パルスレーザでなぞることによって，ウエハを割断できる．Single-crystal sapphire wafers were cleaved by irradiation with a pulsed CO2 laser. Laser cleaving is a useful method to cut sapphire wafers. A striped pattern on the cleaved surface is observed when a pulsed laser is used. Laser cleaving makes it possible to cut the sapphire along the circular arc. Sapphire wafers can be cleaved by laser irradiating along a pre-made shallow groove.","subitem_description_type":"Abstract"}]},"item_4_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24517/00008934","subitem_identifier_reg_type":"JaLC"}]},"item_4_publisher_17":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"砥粒加工学会 = The Japan Society for Abrasive Technology"}]},"item_4_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"10.11420/jsat.55.424","subitem_relation_type_select":"DOI"}}]},"item_4_relation_28":{"attribute_name":"関連URI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"http://www.jsat.or.jp/","subitem_relation_type_select":"URI"}},{"subitem_relation_type_id":{"subitem_relation_type_id_text":"http://www.jsat.or.jp/journal/journal.jsp","subitem_relation_type_select":"URI"}},{"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://www.jstage.jst.go.jp/browse/jsat/-char/ja/","subitem_relation_type_select":"URI"}}]},"item_4_rights_23":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright © 2011 社団法人 砥粒加工学会 The Japan Society for Abrasive Technology"}]},"item_4_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0914-2703","subitem_source_identifier_type":"ISSN"}]},"item_4_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"上田, 隆司"}],"nameIdentifiers":[{},{},{}]},{"creatorNames":[{"creatorName":"三野, 大樹"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"古本, 達明"}],"nameIdentifiers":[{},{},{},{}]},{"creatorNames":[{"creatorName":"細川, 晃"}],"nameIdentifiers":[{},{},{},{}]},{"creatorNames":[{"creatorName":"長友, 正平"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-10-03"}],"displaytype":"detail","filename":"TE-PR-UEDA-T-424.pdf","filesize":[{"value":"955.8 kB"}],"format":"application/pdf","licensetype":"license_11","mimetype":"application/pdf","url":{"label":"TE-PR-UEDA-T-424.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/8947/files/TE-PR-UEDA-T-424.pdf"},"version_id":"70a880ef-ba4c-43ab-b53d-15890a046bd5"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"CO2パルスレーザによるサファイアウエハの熱応力割断","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"CO2パルスレーザによるサファイアウエハの熱応力割断"},{"subitem_title":"Journal of the Japan Society for Abrasive Technology","subitem_title_language":"en"}]},"item_type_id":"4","owner":"3","path":["4191"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-10-03"},"publish_date":"2017-10-03","publish_status":"0","recid":"8947","relation_version_is_last":true,"title":["CO2パルスレーザによるサファイアウエハの熱応力割断"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-07-27T10:31:49.865364+00:00"}