@article{oai:kanazawa-u.repo.nii.ac.jp:00009038, author = {Ishikawa, Kyosuke and Ishijima, Tatsuo and Sasai, Kensuke and Toyoda, Hirotaka and Sugai, Hideo}, issue = {3}, journal = {Transactions of the Materials Research Society of Japan}, month = {Jan}, note = {金沢大学理工研究域サステナブルエネルギー研究センター}, pages = {683--686}, title = {Surface Modification of Fluorocarbon Polymer Film by High Density Microwave Plasma}, volume = {33}, year = {2008} }