WEKO3
インデックスリンク
アイテム
回転スピン制御法による窒化ケイ素球の超精密研磨
http://hdl.handle.net/2297/43202
http://hdl.handle.net/2297/43202f0e8cd4f-c44a-45e5-ba5f-749171cff8f1
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
TE-PR-KUROBE-T-1392.pdf (1.3 MB)
|
|
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-10-03 | |||||
| タイトル | ||||||
| タイトル | 回転スピン制御法による窒化ケイ素球の超精密研磨 | |||||
| タイトル | ||||||
| タイトル | Super Fine Finishing of Si3N4 Ceramic Ball Using Spin Angle Controlled Machining Method | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
黒部, 利次
× 黒部, 利次× 森田, 知之× 土橋, 尚久 |
|||||
| 書誌情報 |
精密工学会誌論文集 = Journal of the Japan Society for Precision Engineering. Supplement. Contributed papers 巻 70, 号 11, p. 1392-1396, 発行日 2004-01-01 |
|||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 1348-8724 | |||||
| NCID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA11966630 | |||||
| DOI | ||||||
| 関連タイプ | isIdenticalTo | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.2493/jspe.70.1392 | |||||
| 出版者 | ||||||
| 出版者 | 精密工学会 = The Japan Society for Precision Engineering | |||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Spin angle controlled ball lapping method developed recently, is to have an excellent performance to finish the ball, in which V-groove lapping plate is separated into two parts and three plates are able to rotate independently. However, lapping of ceramic ball such as a silicon nitride one is very hard. Present paper focuses on both of the grinding characteristics and polishing ones of a silicon nitride ball. Grinding is conducted using the diamond wheels with grain size degradation, and then polishing is performed with very fine diamond of average grain size of nano-meter. It is found that the grain size degradation grinding method has very effective performance of finishing of the silicon nitride ball. Polishing of the ceramic ball with slurry mixed super fine diamonds into an ion-exchanged water yields higher decrease of nano-meter level of surface roughness. Spin angle controlled finishing method describes that higher finishing performance rather than conventional one. | |||||
| 権利 | ||||||
| 権利情報 | Copyright © The Japan Society for Precision Engineering 精密工学会 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| 関連URI | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://www.jstage.jst.go.jp/browse/jspe/-char/ja/ | |||||
| 関連URI | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://www.jspe.or.jp/ | |||||
