{"created":"2023-07-27T06:25:48.842950+00:00","id":9266,"links":{},"metadata":{"_buckets":{"deposit":"1d2fb946-b5a8-477a-a54f-78132419f75b"},"_deposit":{"created_by":3,"id":"9266","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"9266"},"status":"published"},"_oai":{"id":"oai:kanazawa-u.repo.nii.ac.jp:00009266","sets":["934:935:936"]},"author_link":["399","13286","13287"],"item_4_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2011-01-01","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"O37","bibliographicPageEnd":"1036","bibliographicPageStart":"1035","bibliographicVolumeNumber":"2011S","bibliographic_titles":[{"bibliographic_title":"精密工学会学術講演会講演論文集"}]}]},"item_4_description_21":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"高精度3次元形状計測法の一つに白色干渉顕微鏡がある。この計測方法は縦方向に高い分解能を有するが、外力による振動に弱いという問題があった。この要因として、干渉像の露光中に測定対象が動くために正確な位相が得られないことが挙げられる。本研究では専用に開発したレーザ変位計を用いてリアルタイムに光路差(対象物ステージ移動量)を測定し、露光中の光路差変化量と白色干渉像から正確に位相を抽出する補正法を開発した。","subitem_description_type":"Abstract"}]},"item_4_publisher_17":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"精密工学会 = The Japan Society for Precision Engineering"}]},"item_4_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"10.11522/pscjspe.2011S.0.1035.0","subitem_relation_type_select":"DOI"}}]},"item_4_relation_28":{"attribute_name":"関連URI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://www.jstage.jst.go.jp/browse/pscjspe/-char/ja/","subitem_relation_type_select":"URI"}},{"subitem_relation_type_id":{"subitem_relation_type_id_text":"http://www.jspe.or.jp/","subitem_relation_type_select":"URI"}}]},"item_4_rights_23":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"Copyright © The Japan Society for Precision Engineering"}]},"item_4_version_type_25":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"丹羽, 康人"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"安達, 正明"}],"nameIdentifiers":[{},{},{}]},{"creatorNames":[{"creatorName":"岩尾, 雄太"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2017-10-03"}],"displaytype":"detail","filename":"TE-PR-ADACHI-M-1035.pdf","filesize":[{"value":"540.9 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"TE-PR-ADACHI-M-1035.pdf","url":"https://kanazawa-u.repo.nii.ac.jp/record/9266/files/TE-PR-ADACHI-M-1035.pdf"},"version_id":"d5b6fe94-a240-4717-baa4-d815ab117982"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"振動環境下で撮影された白色干渉像からの高精度位相抽出","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"振動環境下で撮影された白色干渉像からの高精度位相抽出"}]},"item_type_id":"4","owner":"3","path":["936"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-10-03"},"publish_date":"2017-10-03","publish_status":"0","recid":"9266","relation_version_is_last":true,"title":["振動環境下で撮影された白色干渉像からの高精度位相抽出"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2023-07-28T01:56:56.734573+00:00"}