@article{oai:kanazawa-u.repo.nii.ac.jp:00009295,
 author = {安達, 正明 and 三木, 秀司 and 中井, 康秀 and 川口, 格},
 issue = {1},
 journal = {精密工学会誌 = Journal of the Japan Society for Precision Engineering},
 month = {Jan},
 note = {A novel optical profiling method is proposed, which is nearly insensitive to vertical vibrations and able to measure the roughness of supersmooth surfaces on a long track. This method makes simultaneous height measurements of both a measurement position and its surroundings and perform subsequent digital subtraction of the latter from the former to obtain the roughness data. An instrument incorporated with this method is shown to have a height sensitivity of 0.1 nm under normal vibrational circumstance (0.4 cm/S2). Data obtained from measurements of a disk substrate, a mirror, an optical flat and a silicon wafer are included.},
 pages = {140--145},
 title = {上下振動の影響を受けない高精度粗さ測定法(第1報): オプティカルスキッド法の提案},
 volume = {56},
 year = {1990}
}